http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
Viscous Damping Effect on the CMUT Device in Air
이승목,Bu-sang Cha,Masanori Okuyama 한국물리학회 2011 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.58 No.4
Acoustic damping of a capacitive micromachined ultrasonic transducer (CMUT) having a perforated circular membrane in air causes mechanical impedance to the plate vibration. We observed the effect of acoustic damping on the operation of the perforated membrane plate of a CMUT under various geometrical conditions. The damping force of the perforated plate was computed for each area ratio of the acoustic holes (AR) condition, and the results were introduced into calculations of the frequency response function (FRF) using the finite element method (FEM) to take the squeeze-film damping effect into account. The Q factor and the damping ratio of the CMUT under various AR and air-gap height (h) conditions of the device were studied; the acoustic damping effect is discussed in terms of design optimization.