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RISS 인기검색어
- 검색키워드
- 저자 : 이상현(Sang Hyeon Lee) (검색결과 385 건)
- 무료
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전기로를 이용한 Si || SiO<sub>2</sub>/Si<sub>3</sub>N<sub>4</sub> || Si 이종기판쌍의 직접접합
이상현,이상돈,서태윤,송오성,Lee, Sang-Hyeon,Lee, Sang-Don,Seo, Tae-Yun,Song, O-Seong 한국재료학회 2002 한국재료학회지 Vol.12 No.2
We investigated the possibility of direct bonding of the Si ∥SiO$_2$/Si$_3$N$_4$∥Si wafers for Oxide-Nitride-Oxide(ONO) gate oxide applications. 10cm-diameter 2000$\AA$-thick thermal oxide/Si(100) and 500$\AA$-Si$_3$N$_4$LPCVD/Si (100) wafers were prepared, and wet cleaned to activate the surface as hydrophilic and hydrophobic states, respectively. Cleaned wafers were premated wish facing the mirror planes by a specially designed aligner in class-100 clean room immediately. Premated wafer pairs were annealed by an electric furnace at the temperatures of 400, 600, 800, 1000, and 120$0^{\circ}C$ for 2hours, respectively. Direct bonded wafer pairs were characterized the bond area with a infrared(IR) analyzer, and measured the bonding interface energy by a razor blade crack opening method. We confirmed that the bond interface energy became 2,344mJ/$\m^2$ when annealing temperature reached 100$0^{\circ}C$, which were comparable with the interface energy of homeogenous wafer pairs of Si/Si.
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일간 빔 출력 확인을 위한 평가도구인 Machine Performance Check의 유용성 평가
이상현,안우상,이우석,최진혁,김선연,Lee, Sang Hyeon,Ahn, Woo Sang,Lee, Woo Seok,Choi, Jin Hyeok,Kim, Seon Yeon 대한방사선치료학회 2017 대한방사선치료학회지 Vol.29 No.2
Purpose: Machine Performance Check (MPC) is a self-checking software based on the Electronic Portal Imaging Device (EPID) to measure daily beam outputs without external installation. The purpose of this study is to verify the usefulness of MPC by comparing and correlating daily beam output of QA Beamchecker PLUS. Materials and Methods: Linear accelerator (Truebeam 2.5) was used to measure 10 energies which are composed of photon beams(6, 10, 15 MV and 6, 10 MV-FFF) and electron beams(6, 9, 12, 16 and 20 MeV). A total of 80 cycles of data was obtained by measuring beam output measurement before treatment over five months period. The Pearson correlation coefficient was used to evaluate the consistency of the beam output between the MPC and the QA Beamchecker PLUS. In this study, if the Pearson correlation coefficient is; (1) 0.8 or higher, the correlation is very strong (2) between 0.6 and 0.79, the correlation is strong (3) between 0.4 and 0.59, the correlation is moderate (4) between 0.2 and 0.39, the correlation is weak (5) lower than 0.2, the correlation is very weak. Results: Output variations observed between MPC and QA Beamchecker PLUS were within 2 % for photons and electrons. The beam outputs variations of MPC were $0.29{\pm}0.26%$ and $0.30{\pm}0.26%$ for photon and electron beams, respectively. QA Beamchecker PLUS beam outputs were $0.31{\pm}0.24%$ and $0.33{\pm}0.24%$ for photon and electron beams, respectively. The Pearson correlation coefficient between MPC and QA Beamchecker PLUS indicated that photon beams were very strong at 15 MV, and strong at 6 MV, 10 MV, 6 MV-FFF and 10 MV-FFF. For electron beams, the Pearson correlation coefficient were strong at 16 MeV and 20 MeV, moderate at 9 MeV and 12 MeV, and very weak at 6 MeV. Conclusion: MPC showed significantly strong correlation with QA Beamchecker PLUS when testing with photon beams and high-energy electron beams in the evaluation of daily beam output, but the correlation when testing with low-energy electron beams (6 MeV) appeared to be low. However, MPC and QA Beamchecker PLUS are considered to be suitable for checking daily beam output, as they performed within 2 % of beam output consistency during the observation. MPC which can perform faster than the conventional daily beam output measurement tool, is considered to be an effective method for users.
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이상현,Lee, Sang-Hyeon 한국화재보험협회 2002 防災와 保險 Vol.93 No.-
본 자료는 캐나다국립연구원 산하 건설연구소에 근무하는 김기홍 박사를 초청, '소화설비의 최근 개발 동향' 이란 주제로 열린 세미나에서 발표한 내용을 정리한 것으로, 최근 할론소화약제가 단계적으로 사용 금지 됨에 따라 새로 개발된 소화설비들 중에서 할로카본 소화약제에 관해 소개하고자 한다.
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이상현,Lee, Sang-Hyeon 한국조경수협회 2008 造景樹 Vol.104 No.-
녹병은 향나무뿐만 아니라 산당화, 꽃사과, 산사나무, 명자나무 등 조경수에도 많이 발생되며, 조경수목으로서의 미관적 가치를 크게 떨어뜨리고 잎 뒷면에 발생되는 녹포자퇴는 사람들에게 혐오감을 준다. 또한 배나무, 사과나무 등의 과일의 상품성과 생산량을 크게 저하시켜 농가에 큰 피해를 준다. 녹병은 일반적으로 농가에서는 붉은별무늬병으로 잘 알려져 있는 병해이다.
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