투과율 조절 포토마스크 기술의 ArF 리소그래피 적용

이동근,박종락,Lee, Dong-Gun,Park, Jong-Rak 한국광학회 2007 한국광학회지 Vol.18 No.1

본 논문에서는 포토마스크 후면에 위상 패턴을 형성하여 웨이퍼 상 CD(critical dimension) 균일도를 개선할 수 있는 투과율 조절 포토마스크 기술을 ArF 리소그래피에 적용한 결과에 대하여 보고한다. 위상 패턴 조밀도에 따른 노광 광세기 변화 계산에 포토마스크 후면으로부터 포토마스크 전면까지의 광의 전파를 고려하여 ArF 파장에서의 위상 패턴 조밀도에 따른 노광 광세기 저하에 관한 실험결과를 이론적으로 재현할 수 있었다. 본 기술을 ArF 리소그래피에 적용하여 DRAM(Dynamic Random Access Memory)의 한 주요 레이어에 대해 필드 내 CD 균일도를 $3{\sigma}$ 값으로 13.8 nm에서 9.7 nm로 개선하였다. We report theoretical and experimental results for application of transmittance-controlled photomask technology to ArF lithography. The transmittance-controlled photomask technology is thought to be a promising technique fo critical dimension (CD) uniformity correction on a wafer by use of phase patterns on the backside of a photomask. We could theoretically reproduce experimental results for illumination intensity drop with respect to the variation of backside phase patterns by considering light propagation from the backside to the front side of a photomask at the ArF lithography wavelength. We applied the transmittance-controlled photomask technology to ArF lithography for a critical layer of DRAM (Dynamic Random Access Memory) having a 110-nm design rule and found that the in-field CD uniformity value was improved from 13.8 nm to 9.7 nm in $3{\sigma}$.

경남 일원의 논흙 및 쌀 중의 중금속

이동근(Dong-Gun Lee),임경택(Gyung-Teck Lim) 한국식품영양과학회 1977 한국식품영양과학회지 Vol.6 No.1

1. 쌀 중의 구리 함량은 0.62~2.59 ppm으로써 울주산에서 최고 함량이 검출되었다.<br/> 2. 납은 0.06~0.2 ppm의 범위이며, 최고치는 진양산이었다.<br/> 3. 아연은 0.11~0.61 ppm으로 진양산이 가장 높은 함량을 나타내었다.<br/> 4. 카드뮴은 시료 중 4개소만 검출되었고 0.004 ppm이하로 나타났었다.<br/> 5. 수은은 시료 중 6개가 검출되었으며 0.008ppm이하이었다.<br/> 6. 논흙과 쌀의 중금속 함량비는 구리에서 6:1, 납 14:1, 아연 56:1이고 카드뮴과 수은은 미량으로 나타났었다. Heavy metals in the rice and rice paddy soil of Kyung Nam district were surveyed by use of MIBK extraction and atomic absorption spectrophotomter. Mercury was analyzed by nom-flame mercury vapor method. Rice paddy soil showed that cupper amounted to the level of 13.8-8.4ppm, average value of 11.5ppm. Lead: 2.6~0.6ppm, average 0.02ppm. The conentration of heavy metal 0.04-0.01 ppm, average 1.5 ppm, Zinc ; 16.1-7.2ppm, average 11.3 ppm. Cadmium in rice were containted 2.59~0.16ppm of cupper, average value of 1.80 ppm. Lead : 0.20-N.D, Zinc ; 0.11-0.60 ppm. Cadmium was shown trace at 4 places and mercury was shown trace at 6 places.<br/> Cupper showed the highest ratio of heavy metal. Levels in rice and soil whereas zinc showed the highest transmission from soil to rice.

수학적 지식으로서의 평균 개념 구성 과정에서 나타난 학생들의 표현에 관한 연구

이동근 ( Lee Dong Gun ) 한국수학교육학회 2018 수학교육 Vol.57 No.3

In school mathematics, the concept of an average is not a concept that is limited to a unit of statistics. In particular, high school students will learn about arithmetic mean and geometric mean in the process of learning absolute inequality. In calculus learning, the concept of average is involved when learning the concept of average speed. The arithmetic mean is the same as the procedure used when students mean the test scores. However, the procedure for obtaining the geometric mean differs from the procedure for the arithmetic mean. In addition, if the arithmetic mean and the geometric mean are the discrete quantity, then the mean rate of change or the average speed is different in that it considers continuous quantities. The average concept that students learn in school mathematics differs in the quantitative nature of procedures and objects. Nevertheless, it is not uncommon to find out how students construct various mathematical concepts into mathematical knowledge. This study focuses on this point and conducted the interviews of the students(three) in the second grade of high school. And the expression of students in the process of average concept formation in arithmetic mean, geometric mean, average speed. This study can be meaningful because it suggests practical examples to students about the assertion that various scholars should experience various properties possessed by the average. It is also meaningful that students are able to think about how to construct the mean conceptual properties inherent in terms such as geometric mean and mean speed in arithmetic mean concept through interview data.

이차함수에서 두 변량사이의 관계 인식 및 표현의 발달 과정 분석: 민선의 경우를 중심으로

이동근 ( Dong Gun Lee ),문민정 ( Min Joung Moon ),신재홍 ( Jaehong Shin ) 한국수학교육학회 2015 수학교육 Vol.54 No.4

The aim of this qualitative case study is twofold: 1) to analyze how an eleventh-grader, Min-Seon, conceive and represent a pattern of change between two varying quantities in a quadratic functional situation, and 2) further to help her form a concept of ``derivative`` as a tool to express the relationship with employing a concept of ``rate of change.`` The result indicates that Min-Seon was able to construct graphs of piecewise functions that take average rates of change as range of the functions, and managed to conjecture the derivative of a quadratic function, y=x ^{2}. In conclusion, we argue that covariational approach could not only facilitate students`` construction of an initial function concept, but also support their understanding of the concept of ``derivative.``

제천지역 전설의 분류와 특징

이동근 ( Lee Dong-gun ) 세명대학교 지역문화연구소 2003 지역문화연구 Vol.2 No.-

The result of study on the legend of Checheon-city is as follows. 1)It is necessary to change work’s name because the title of legend is inadequated. 2)Explanatory legend works are 36 pieces, historical legend works are 14 pieces, and religious legend works are 33 pieces. 3)Local distributive numbers of legend works are 11 pieces in Bongyang-eup(邑), 9 pieces in Keumseong-myeon(面), 8 pieces Cheongpoong-myeon, 9 pieces Soosan-myeon, 6 pieces Deoksan-myeon, 5 pieces Hansoo-myeon, 6 pieces Baikwoon-myeon, 6 pieces Songhak-myeon, 15 pieces in dong(洞) areas. 4)Variable feature is appeared 23 times of 75 works. 5)Space tradition works are 30 pieces, religious tradition works are 25 pieces, wisdom works are 7 pieces, retribution works are 7 pieces, criticism works are 5 pieces, admiration works are 4 pieces, misfotune works are 3 pieces, love works are 2 pieces, and transmigration works are 2 pieces on the traditional view.

『삼국사기』소재 서독류(書牘類) 일고찰

이동근(Lee Dong-gun) 우리말글학회 2009 우리말 글 Vol.45 No.-

The purpose of this study is founding the literary characters of 「Dapseolinguiseo(答薛仁貴書)」, 「Giseotaijowal(寄書太祖曰)」, 「Taijodapwal(太祖答曰)」. Letter in Samguk periods is a diplomatic document but is literary works because of the alluding to a historical event and metaphorical expressions. 「Dapseolinguiseo(答薛仁貴書)」 written by Kangsoo(强首) is not literary letter because of practical letter. 「Giseotaijowal(寄書太祖曰)」written by Choiseungwoo(崔承祐) is literary letter because of fresh rhetoric and the alluding to a historical event. 「Taijodapwal(太祖答曰)」written by Choieonwi(崔彦?) is also literary letter because of fresh rhetoric and the alluding to a historical event. Giving a specific example, two works show consistently a tactical error, solving matters with reason, compared with war potential of he and I, driving strong & soft strategy, conquest but no battle, Heaven helps and God assists in content and plot, and reappear battle scene, fresh expression, propery rhetoris, strong style, the effective alluding to a historical event in expression. Conclusionary 「Giseotaijowal(寄書太祖曰)」 & 「Taijodapwal(太祖答曰)」 is a literary written appeals equal to Kyeongwangsoseo(檄黃巢書) written by Choichiweon(崔致遠). The study of another literary style in Samguksagi(『三國史記』) & Samgukyusa(『三國遺事』) is remained thesis.

비대면 원격수업 형태 중 실시간 쌍방향 수업 자료 개발 사례 연구: 고등학교 기하 과목 공간도형 단원의 평면의 결정 요건을 중심으로1

이동근 ( Lee Dong Gun ),안상진 ( Ahn Sang Jin ) 한국수학교육학회 2021 수학교육논문집 Vol.35 No.2

본 연구는 국내 선행 연구에서 ‘팬데믹(pandemic)시기에 교사들을 대상으로 진행한 설문 조사 결과 원격수업 형식 중 ‘실시간 쌍방향 형’ 수업이 차지하는 비중이 현저하게 적다는 점‘을 지적한 것에 주목하여, 고등학교 수학 교과 기하 과목의 ‘평면의 결정 요건’을 중심으로 ‘실시간 쌍방향 형’ 비대면 수업 자료를 개발하여 수업에 적용한 사례를 보고한 연구이다. 개발에 참여한 교사는 고등학교 교직 경력 28년차의 서울 소재 고등학교에 근무하는 수학 교사(수석교사) 1인이며, 2020년에 수학 교과의 기하 과목을 담당한 교사이다. 개발 교사는 실시간 쌍방향 형 비대면 수업을 개발하기로 한 이후, 수업 내용의 선정과 온라인 수업 도구를 선정하는 과정을 거친 다음 ‘만남 및 수업 안내’, ‘동기부여’, ‘과제 제시’, ‘개별 탐구 활동 및 교사 피드백’, ‘성찰 및 평가’의 네 단계로 수업 지도안을 구성하여 자료를 개발하였다. 특히 ‘동기 부여’ 과정에서는 개발 교사가 화이트보드 애니메이션 제작 프로그램인 Videoscribe를 이용해서 5분 정도의 영상 자료를 제작하여 제시하였으며, ‘과제제시’에서 과제 8번의 경우에는 학생들의 수업 종료 이후 자유로운 소감을 기록하는 것으로 구성하였는데, 이는 학생 스스로의 평가 장치임과 동시에 학생의 교사에 대한 피드백 제공 역할을 하였다. 본 연구는 현장 교사가 수업 자료를 개발하는 일련의 과정을 소개한 사례 연구로서, 수업에 바로 적용 가능한 수업 자료 제시와 더불어서 이후 수업 자료 개발에 대한 샘플 제시 역할에 목표를 두고 진행한 연구결과물이다. 개발한 자료는 수업에 참여한 학생들의 의견 수렴 및 수학교사 3인에게 의뢰한 평가 결과를 바탕으로 수업 자료로서의 적합성 검증을 거쳤다. This study noted that a survey of teachers in a leading study conducted in Korea during the Pandemics period pointed out that the "real-time interactive" classes account for a significantly small portion of the remote class format. Contentually, the study reported cases of developing and applying "real-time interactive" class materials based on "planar decision requirements" of high school mathematics subject geometry. The teacher who participated in the development was a math teacher who worked at a Seoul-based high school with 28 years of high school teaching experience, and a teacher who was in charge of geometry in the math department in 2020. The development teacher decided to develop real-time interactive classes. In particular, the materials were developed by organizing the class guidance plan in four stages: 'Meeting and Class Guidance', 'Giving motivation', 'Suggesting tasks', 'Individual Investigative Activities and Teacher Feedback' and 'Reflection and Evaluation' which were selected through the process of selecting the class contents and selecting online class tools. At this time, the development teacher produced and presented about five minutes of video material using the videooscribe, a whiteboard animation program. And in case of task number 8, it consisted of recording the students' free thoughts after class, which served as a role of assessment by students themselves and providing feedback to their teachers. This study is a case study that introduces a series of courses in which field teachers develop class materials, and in addition to presenting class materials that can be applied directly to classes, is a result of a study that focuses on the role of presenting samples for future class data development. The materials developed were verified as class materials based on the opinions of the students who participated in the class and the results of the evaluation commissioned by the three math teachers.

다양한 형태의 등비급수 과제들에 대한 학생들의 생각과 표현에 관한 사례연구

이동근 ( Lee Dong Gun ) 한국수학교육학회 2018 수학교육 Vol.57 No.4

This study started with the following questions. Suppose that students do not accept various forms of geometric series tasks as the same task. Also, let's say that the approach was different for each task. Then, when they realize that they are the same task, how will students connect the different approaches? This study is a process of pro-actively confirming whether or not such a question can be made. For this purpose, three students in the second grade of high school participated in the teaching experiment. The results of this study are as follows. It also confirmed how the students think about the various types of tasks in the geometric series. For example, students have stated that the value is 1 in a series type of task. However, in the case of the 0.999... type of task, the value is expressed as less than 1. At this time, we examined only mathematical expressions of students approaching each task. The problem of reachability was not encountered because the task represented by the series symbol approaches the problem solved by procedural calculation. However, in the 0.999... type of task, a variety of expressions were observed that revealed problems with reachability. The analysis of students' expressions related to geometric series can provide important information for infinite concepts and limit conceptual research. The problems of this study may be discussed through related studies. Perhaps more advanced research may be based on the results of this study. Through these discussions, I expect that the contents of infinity in the school field will not be forced unilaterally because there is no mathematical error, but it will be an opportunity for students to think about the learning method in a natural way.

<수학과제 탐구> 과목의 인물 중심 수업 자료 개발 관련 연구

이동근 ( Lee Dong Gun ) 한국수학교육학회 2021 수학교육논문집 Vol.35 No.4

본 연구는 ‘<수학과제 탐구> 과목 관련 자료 개발 연구가 현장 지원 연구로서의 가치가 있다는 점’과 ‘자료 개발에 있어 수학 개념과 관련된 인물들의 지식 구성과 탐구 활동을 중심으로 자료를 구성하는 것이 수업자료 개발에 도움을 줄 수 있다는 점’ 및 ‘그동안의 <수학과제 탐구> 과목 자료 개발이 미비하다는 점’ 등을 고려하여, 현장 교사들이 수업에 바로 적용하는 것이 가능한 수업자료를 개발한 연구이다. 이를 위하여 본 연구는 ‘자료 개발 계획 수립, 자료 개발, 개발 자료에 대한 현장 교사 검증, 개발 자료에 대한 교과 전문가 검증, 검증 의견을 반영한 최종 자료 개발’의 절차를 거쳤다. 이에 과제 탐구 모형을 반영한 1차시 50분을 기준으로 하였을 때 3차시 분량의 수업 자료를 개발할 수 있었다. 본 연구에서는 17주를 기준으로 한 교육과정 계획표와 교사-학생 상호 작용이 제시된 수업 지도안 및 학생들이 수업 때 작성하여 제출하는 과제 개발서 양식을 하나의 세트로 하여 개발 자료를 제시하였다. 본 연구는 개발된 자료를 실제 수업에 적용하는 것을 염두에 두고 개발하였다. 따라서 개발된 자료를 실제 수업에 적용해보고 그 결과를 분석하는 연구를 필요로 한다. This study is a study that developed class materials that can be applied directly to classes by field teachers in consideration of '< Mathematics Project Inquiry Subject > research on the development is valuable as a field support study.', 'In material development, organizing data centering on the knowledge composition and inquiry activities of characters related to the mathematics concept can help develop class materials', and 'The fact that the development of subject data for < Mathematics Project Inquiry Subject > has been insufficient'. To this end, this study went through the procedure of ‘establishing a data development plan, data development, verifying field teachers on development data, verifying subject experts on development data, and developing final data reflecting verification opinions.’ Therefore, based on the 1st 50 minutes reflecting the task exploration model, it was possible to develop class materials for the 3rd time. In this study, development data were presented with a 17-week curriculum plan, a class guidance plan that presents teacher-student interaction, and a task development form that students fill out and submit in class. This study was developed with the developed data in mind to be applied to actual classes. Therefore, a follow-up study is needed to apply the developed data to actual classes and analyze the results.

해양콘크리트구조물의 부식 방지를 위한 고내구성 재료의 성능비교

이동근(Lee, Dong Gun),김명유(Kim, Myung Yu),양은익(Yang, Eun Ik),이성태(Yi, Seong Tae),한상훈(Han, Sang Hoon) 한국콘크리트학회 2006 한국콘크리트학회 학술대회 논문집 Vol.2006 No.11