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윤혁중(Hyug-Jung Youn),문태영(Tae-Young Moon) 산업기술교육훈련학회 2007 산업기술연구논문지 (JITR) Vol.12 No.3
This study is about jig used in wiring when we make probe card. The most universal wiring method is molding with Bond. Polymer film is punched down and adhesives is applied after wiring. Due to shrinkage and modification, many problems still have happened in the process of molding. To solve these problems, ceramic plate was introduced in the study. Using Nd:YAG Laser, an experiment of micro-hole treatment on ceramic plate was proceeded. In the condition of energy 0.08J, frequency 20Hz and interval time 200 , about 70 micro-hole was adequate for the probe card jig. In the purity experiment of ceramic materials, high purity ceramic met with good result for micro-hole. The shape and size of combustion gas Air, O2 was better than N2 and Ar, sublimation gas.