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Single-phase Sr2FeMoO6 thin films were produced by RF magnetron sputtering for use as electrodes in integrated sensors and found to be good conductors at room temperature. The films were deposited from a powder-type sputtering target under various conditions, and were crystallized by annealing. Elimination of O2 gas during deposition, by the use of a solely Ar sputtering gas under a working pressure as low as possible, and vacuum annealing were important to promote the Sr2FeMoO6phase. However, oxygen exclusion from sputtering and annealing was not enough to yield single-phase Sr2FeMoO6: hydrogen annealing was also required. Film production was optimized by varying the deposition parameters and hydrogen annealing conditions. The film had good electrical conduction, with a low resistivity of 1.6×10-2Ω․cm at room temperature.
This paper presents the algorithm and structure of a 3D dental model scanner that can obtain the 3D point data of the plaster dental model of human. Since the shape of dental model is complicated, the scanner is designed to have the measuring pose changing mechanism driven by three stepping motors. An automatic teaching algorithm is developed to automatically find the series of measuring poses (in terms of three angles of the stepping motors) and finally produce the optimal scanned data with minimal unscanned area. The dental model is designed as a parametric model that can change the position and the orientation of an individual tooth to match the model with the shape of patient's teeth.
Embedded capacitor technology is one of the effective packing technologies for further miniaturization and higher performance of electric packaging system. In this paper, the embedded capacitors were simulated and fabricated in 8-layered printed circuit board employing standard PCB processes. The composites of barium titanante($BaTiO_3$) powder and epoxy resin were employed for the dielectric materials in embedded capacitors. Theoretical considerations regarding the embedded capacitors have been paid to understand the frequency dependent impedance behavior. Frequency dependent impedance of simulated and fabricated embedded capacitors was investigated. Fabricated embedded capacitors have lower self resonance frequency values than that of the simulated embedded capacitors due to the increased parasitic inductance values. Frequency dependent capacitances of fabricated embedded capacitors were well matched with those of simulated embedded capacitors from the 100MHz to 10GHz range. Quality factor of 20 was observed and simulated at 2GHz range in the 10 pF embedded capacitors. Temperature dependent capacitance of fabricated embedded capacitors was presented.
Conductive SrMoO₃ thin films were fabricated by RF magnetron sputtering with the powder-type sputtering target, and annealed for crystallization. When RTP (rapid thermal processing) in vacuum was applied, the fabricated thin films showed the mixed phases of SrMoO₃ and SrMoO₄, but SrMoO₃ phase could be promoted by the lowering of the working pressure during deposition. In order to eliminate O₂ gas during deposition and annealing, further lowering of the working pressure and furnace annealing in hydrogen atmosphere were tried. With the optimization of the deposition and annealing conditions, the thin film with nearly single-phase of SrMoO₃ was obtained, and it showed good electrical conduction properties with a low resistivity of 2.5×10_(-3)Ω•cm at room temperature. 분말형타겟을 사용한 스퍼터증착과 결정화열처리를 통하여 전도성 SrMoO₃ 박막을 제조하였다. 진공분위기 RTP (rapid thermal processing) 열처리를 적용한 경우 제조된 박막은 SrMoO₃와 SrMoO₄혼합상을 나타내었으나 스퍼터증착 중 작업압력을 낮출 경우 SrMoO₃상을 얻는데 유리한 결과를 보였다. 스퍼터증착 중 잔류 산소를 최대한 배제하기 위하여 작업압력을 더욱 낮추고 수소분위기 열처리를 적용하여 SrMoO₃단일상 박막 제조를 시도하였으며 증착조건과 열처리조건을 최적화하여 거의 단일상인 SrMoO₃ 박막을 얻을 수 있었다. 이 박막은 상온비저항이 2.5×10_(-3)Ω·cm로써 좋은 전기전도 특성을 나타내었다.