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이중원통형 유체층에서 용기의 회전이 열모세관 유동에 미치는 영향
곽호상(Ho Sang Kwak),우마로프알리세르(Alisher Umarov),김경진(Kyoungjin Kim) 대한기계학회 2009 대한기계학회 춘추학술대회 Vol.2009 No.11
A numerical study is conducted on thermocapillary flow of thin fluid layer in an annulus with an imposed horizontal temperature difference. In this flow configuration simulating a semiconductor materials processing, the flow is affected by the interaction between buoyancy and surface tension. In a very thin fluid layer, hydrothermal waves occur due to the dominant thermocapillary force. In a relatively thick fluid layer, the flow exhibits long convective rolls formed due to the buoyant flow instability. As a means to suppress these three-dimensional instabilities, rotation of the system is introduced. Numerical results show that the careful use of rotation may be an efficient way to reduce or eliminate hydrothermal waves. For the buoyancy-domanated flow regime, the rotation suppresses the growth of convective instability, but it may invoke other type of three-dimensional waves driven by baroclinic instability.
실리콘 웨이퍼 생산공정용 왁스 스핀코팅장치 내 기류 특성에 대한 3차원 전산유동해석
김용기(Yong-Ki Kim),김동주(Dong-Joo Kim),우마로프 알리세르(Alisher Umarov),김경진(Kyoung-Jin Kim),박준영(Jun-Young Park) 한국기계가공학회 2011 한국기계가공학회지 Vol.10 No.6
Wax spin coating is a part of several wafer handling processes in the silicon wafer polishing station. It is important to ensure the wax layer free of contamination to achieve the high degree of planarization on wafers after wafer polishing. Three-dimensional air flow characteristics in a wax spin coater are numerically investigated using computational fluid dynamics techniques. When the bottom of the wax spin coater is closed, there exists a significant recirculation zone over the rotating ceramic block. This recirculation zone can be the source of wax layer contamination at any rotational speed and should be avoided to maintain high wafer polishing quality. Thus, four air suction ducts are installed at the bottom of the wax spin coater in order to control the air flow pattern over the ceramic block. Present computational results show that the air suction from the bottom is quite an effective method to remove or minimize the recirculation zone over the ceramic block and the wax coating layer.