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魚秀海 영남이공대학 산업기술연구소 1994 産業技術硏究 Vol.7 No.-
The thin, square-diaphragm SOI pressure sensor utlizing shear piezoresistance effect was developed and its characteristics were examined. A SOI structure is effective because the insulator of the SOI structure can be used as either an etch-stop layer for the thickness controll ability and surface smoothness of diaphragm or DI layer of piezoresistor. In this paper, shear stress-type pressure sensor designed using analytical formular and FEM (finite element modeling) simulation. Tow kinds of shear-type pressure sensors, which diaphragm size are 0.8 x 1.2mm² and 0.8 x 2.4mm² respectively, is fabricated in order to compare the maximum shear stress according to diaphragm size. The pressure sensitivity of optimum shear stress gauge was -10.4mV/V.kgf/cm².
生體信號處理를 위한 텔레메트리스시스템 設計에 관한 硏究
魚秀海,朴鍾大,徐熙敦 영남이공대학 산업기술연구소 1992 産業技術硏究 Vol.6 No.-
Implantable biotelemetry systems are indispensable tools not only in animal research but also in clinical medicine as such systems enable the acquisition of otherwise unavailable physiological data. We present the design of implantable 8-channel biotelemetry system. The internal circuits of this system are designed not only to achive as small size and low power dissipation as possible, but also to enable continuous measurement of physiological data after zero reference and synchronization gap. Its main functions are to enable continuous measurement of physiological data and to accomplish on-off power switching of an implantable battery by receiving appropriate command signals from an external circuit. To integrate implantable biotelemetry system, we performed layout of internal system using Lambda based n-well design rules. This system, used together with appropriate sensors; the capacitive pressure sensors, having capacitance to voltage interface circuit to measure ECG, blood pressure etc., and ISFET having a diffential amplifier as an interface circuit, is expected to be capable of measuring and transmitting the physiological data.
4성분계 세라믹스에서 소결온도가 전기적특성에 미치는 영향
魚秀海 영남이공대학 1999 論文集 Vol.28 No.-
The quarternary system ceramics 0.5[×Pb(Zn_⅓Nb⅔)O₃-(1-x)Pb(NZn_⅓Nb⅔)O₃-0.5[YPbTiO₃-(1-y)PbZrO₃] for piezoelectric actuators were prepared by the columbite method were added to the raw materials up to 5 mole. Sintering temperature was varied from 1000℃ to 1200℃ Electric characteristics, dielectric and piezoelectric properties were investigated by sintering temperature. When the amount of PZN and Pt increased, sintered density was increased. This experiment were proved that density and piezoelectric constant dal were independence of sintering temperature over 1100℃
차압형(差壓型) Mass Flow Controller 제작에 관한 연구
어수해 영남이공대학 산업기술연구소 1988 産業技術硏究 Vol.2 No.-
Tow types of mass flow controller of which flow sensor and control valve are integrated on a silicon wafer were fabricated for fine gas control. One has a differential pressure type flow sensor and the other has a thermal flow sensor. It's study is a differential pressure type flow sensor. The composite structure of this integrated mass flow controller consisted of micro-valve, gas channel of V-groove type and mass flow sensor. The stacted piezoactuator used for the control of the valve was small in size(1.4×3×9mm). The controller was fabricated on a silicon wafer of 20×20mm. The results of measurement were given for N₂ gas flow in the flow range of 0 to 60 cc/min at room temperature. Thus, the utilization of silicon micro-machining techniques has been proved to be very useful for the flow control in such sophisticated vacuum system as the processing of semiconductor chip.
어수해 영남이공대학 산업기술연구소 1998 産業技術硏究 Vol.11 No.-
This paper has one purpose composition system which can measure the temperature. As device for temperature sensing, this experiment used AD-592 that sense for fine measuring and linearity to temperature. And this paper determined input voltage as amplificated fine voltage value to 100mV/℃. This experiment used VFC32 which provides an output frequency accurately proportional to its input voltage as V-F converter and I determined 21.7kΩ as input impedence. Through this experiment, this paper prove that variation of temperature can be indicated by frequency. The subject of future is embodying telemetry system.
반도체의 Thermal effect에 의한 流量測定에 관한 연구
어수해,이기태 영남이공대학 1986 論文集 Vol.15 No.-
This paper describes a flow sensing for thermal effect of semiconductor. At present, planar silicon technology allows one to constract very sophisticated integ- ruted circuits for the processing of electronic signals. Flow sensing operation is base on the transfor of heat from a heated chip to a flowing fluid. Temperature difference on the chip is a measure for the flow velocity and flow direction in a plane parallel with the chips surface. The chip characteristics were evaluated theoretically by the heat transfer analysis during circuit design.
MOS에서 Threshold 전압의 溫度依存性에 關한 硏究
魚秀海 영남이공대학 1985 論文集 Vol.14 No.-
This paper investigated the temperature dependency on flat band voltage, flat band capacitance and threshold voltage of MOS structure. Experimental results indicate that: flat band voltage shows constant value up to 200℃ and decreases over the temperature, which generally conforms with theoretical observation, but its variation with the change in the temperature is less than the theoretically predicted value.
Ni-Zn Ferrite에서 燒結溫度가 磁氣性質에 미치는 影響
魚秀海 영남이공대학 1980 論文集 Vol.9 No.-
The Effect of sintering temperature on the magnetic properties of Ni-Zn Ferrites are studied. The contituent oxide mixture, in the ratio of 3 parts NiO, 7 parts ZnO and 10 parts FezOs, are mixed by means of ball mill mixing methods for 5, 15, 30 and 55 hours and subjected to calcination at 1150°C for 3 hours. The samples are then sintered at 1150°C, 1200°C, 1250°C, 1300°C and 1350'C respectively, in the air for 3 hours. The experimental results indicated that the remanent magnetic flux density of the sample is independent of Grain size, but maximum permeability is dependent on Grain size.