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류창수(Chang-Soo Ryu),어수해(Soo-Hae Eoh),강현구(Hyun-Koo Kang),유상욱(Sang-Wook Rhyoo) 한국산업융합학회 2003 한국산업융합학회 논문집 Vol.6 No.4
Most sensor array signal processing methods for multiple source localization require knowledge of the correct shape of array(the correct positions of sensors that consist array), because sensor position uncertainty can severely degrade the performance of array signal processing. In particular, it is assumed that the correct positions of the sensors are known, but the known positions may not represent the true sensor positions. Various algorithms have been proposed for 2-D sensor array shape calibration in far field environment. However, they are not available in near field. In this paper, 3-D sensor array shape calibration algorithm is proposed, which is available in near field.
MOS에서 低溫氣相成長法(LTCVD)에 의한 PSG 膜 形成에 관한 實驗的 硏究
魚秀海,鄭貴相 영남이공대학 산업기술연구소 1988 産業技術硏究 Vol.2 No.-
This paper investigated the effects on the physical propertics of PH₃ doping rate for PSG films by low temperature chemical vapor deposition method. The experimental study indicated that the most adeptable mixing ratios PH₃ to SiH_(4) for films were about 6-8wt% when the films were used as gettering tapering passivating insulation layer of MOS VLSI devices. The physical values of films under the optimum condition were the deposition rate increased linearly for the PH₃ doping rate up to 8wt%, but decreased above 8wt%. The refracitive index, the sheet resistance, the minority carrier lifetime and the mobile ionic charge density were 1.5-1.6, 11 [Ω/ㅁ], 17 [μsec] and 8.1 X10^(10)[cm^(-2)] , respectivity.
Micro-machining技術을of용한 Heat Flow Sensor 製作에 관한 硏究
어수해 영남이공대학 1992 論文集 Vol.21 No.-
The Fabrication of a heat flow sensor on a Si wafer by means of micro-machining technology is described on this paper. The operation of a heat flow sensor is based on the heat transfer from a heated chip to a heat flow. The temperature differences on the chip is a measure for the flow in a plane parallel with the chip surface. An anisortopic etching technique was used for the formation of the V-type groove in this fabrication. The heat flow sensor is made with two main pads; A thin glass plate embodying the connecting parts and heat flow sensor parts in Si chip. The sensor is very small size and fitted well without waste of space. Heat flow sensor can be fabricated on Si chip by micro-machining technology too.
4성분계 세라믹스에서 소결온도가 전기적특성에 미치는 영향
魚秀海 영남이공대학 1999 論文集 Vol.28 No.-
The quarternary system ceramics 0.5[×Pb(Zn_⅓Nb⅔)O₃-(1-x)Pb(NZn_⅓Nb⅔)O₃-0.5[YPbTiO₃-(1-y)PbZrO₃] for piezoelectric actuators were prepared by the columbite method were added to the raw materials up to 5 mole. Sintering temperature was varied from 1000℃ to 1200℃ Electric characteristics, dielectric and piezoelectric properties were investigated by sintering temperature. When the amount of PZN and Pt increased, sintered density was increased. This experiment were proved that density and piezoelectric constant dal were independence of sintering temperature over 1100℃
魚秀海 영남이공대학 산업기술연구소 1994 産業技術硏究 Vol.7 No.-
The thin, square-diaphragm SOI pressure sensor utlizing shear piezoresistance effect was developed and its characteristics were examined. A SOI structure is effective because the insulator of the SOI structure can be used as either an etch-stop layer for the thickness controll ability and surface smoothness of diaphragm or DI layer of piezoresistor. In this paper, shear stress-type pressure sensor designed using analytical formular and FEM (finite element modeling) simulation. Tow kinds of shear-type pressure sensors, which diaphragm size are 0.8 x 1.2mm² and 0.8 x 2.4mm² respectively, is fabricated in order to compare the maximum shear stress according to diaphragm size. The pressure sensitivity of optimum shear stress gauge was -10.4mV/V.kgf/cm².
生體信號處理를 위한 텔레메트리스시스템 設計에 관한 硏究
魚秀海,朴鍾大,徐熙敦 영남이공대학 산업기술연구소 1992 産業技術硏究 Vol.6 No.-
Implantable biotelemetry systems are indispensable tools not only in animal research but also in clinical medicine as such systems enable the acquisition of otherwise unavailable physiological data. We present the design of implantable 8-channel biotelemetry system. The internal circuits of this system are designed not only to achive as small size and low power dissipation as possible, but also to enable continuous measurement of physiological data after zero reference and synchronization gap. Its main functions are to enable continuous measurement of physiological data and to accomplish on-off power switching of an implantable battery by receiving appropriate command signals from an external circuit. To integrate implantable biotelemetry system, we performed layout of internal system using Lambda based n-well design rules. This system, used together with appropriate sensors; the capacitive pressure sensors, having capacitance to voltage interface circuit to measure ECG, blood pressure etc., and ISFET having a diffential amplifier as an interface circuit, is expected to be capable of measuring and transmitting the physiological data.
Piezo-resistance 효과를 이용한 압력 Sensor제작에 관한 연구
어수해,이기태 영남이공대학 1989 論文集 Vol.18 No.-
A thin diaphragm piezoresistive pressure sensor has been developed using micro-machining technique. The pressure induced stresses in the diaphragm are sensed by properly oriented piezoresisturs interconnected to form a bridge. An anisotropic etching technique was used for the formation of the diaphragms. Sensors with a diaphragm having a. diameter of 2mm and a thickness of 40μm have been batch fabricated using this technique. The voltage and resistance sensitivities were. 3.3μV/V.mmHg and 16.7mΩ/Ω. mmHg, respectively.
MOS에서 Threshold 전압의 溫度依存性에 關한 硏究
魚秀海 영남이공대학 1985 論文集 Vol.14 No.-
This paper investigated the temperature dependency on flat band voltage, flat band capacitance and threshold voltage of MOS structure. Experimental results indicate that: flat band voltage shows constant value up to 200℃ and decreases over the temperature, which generally conforms with theoretical observation, but its variation with the change in the temperature is less than the theoretically predicted value.