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Cu(Mg) 박막의 Time Dependent Dielectric Breakdown 특성 평가
안정욱,황상수,박영배,주영창 대한금속재료학회 2005 대한금속·재료학회지 Vol.43 No.2
Electrical properties and time dependent dielectric breakdown (TDDB) characteristics of Cu (0.7 at.% Mg) alloy films are investigated to improve the reliability of Cu interconnects used in microelectronic devices. After Cu(Mg) films are annealed in vacuum at 400℃ for 30 min, resistivity decreases from 3.4 to 2.0 μΩcm and, thin and continuous MgO layers form both on Cu(Mg) film surface and on Cu(Mg)/SiO₂ interface. Metal-Oxide-Silicon (MOS) capacitors composed of Cu(Mg) film deposited on thermal oxide grown on Si wafer are subjected to bias temperature stressing at 180 through 220℃ under electric fields of 1.5 through 2.6 MV/cm. Median time to failure (MTTF) and activation energy of Cu(Mg)/SiO₂ are much larger than those of pure Cu/SiO₂. Cu drifts into dielectric are inhibited by the continuous Mg oxide formed at Cu(Mg)/SiO₂ interface which improve interfacial adhesion and finally lead to better interconnect reliabilities. (Received October 29, 2004)
Does Land Titling Improve Agricultural Productivity?: Evidence from Rural Cambodia
안정욱,김태윤 한국농업경제학회 2023 農業經濟硏究 Vol.64 No.3
This study verifies whether the hypothesis of the positive causal relationship between land titling and agricultural productivity works in rural Cambodia. The effects of land titling may suffer from simultaneous causality bias, which can be partly solved by instrumental variable estimation. It uses the Cambodia Socio-Economic Survey (CSES) parcel-level data surveyed from January 2014 until December 2014. The findings show that the effects of land titling on agricultural productivity are insignificant when village and household fixed effects control it. Land titling does not lead to increased use of inputs for agricultural production. But, it only slightly impacts total debt, not monthly interest rates. The conjecturable reason is that the land title itself affects slightly their debts but those are not invested in their land through agricultural inputs due to lack of credit accessibility. Furthermore, social customs and norms in rural Cambodia may replace the role of land titling.