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ECR-이온 밀링을 이용한 의료용 네블라이저 백금(Pt) 메쉬 제작 특성
안명천,박철우,purevdorj khajidmaa,벌러르마,이원형,홍기민,이상석 한국물리학회 2015 새물리 Vol.65 No.11
A Pt mesh with a foil thickness of 30 μm and a hole diameter of 3.5 μm for a medical respiratory nebulizer was fabricated by using the electron cyclotron resonance (ECR) Ar-ion milling method. The surface morphology of the commercial Pt mesh was investigated by using scanning electron microscopy. Holes in the Cu foil were first formed by using the chemical wet etching method, and Pt was then electroplated on to the surface. The result for the commercial mesh was compared with the result for the mesh fabricated by using a physical dry etching method making use of ECR Ar-ion milling. With photolithography and 10 h of ECR Ar-ion milling, holes of 3.5 μm in diameter and 110 μm in pitch were obtained. Uniform holes with clear surface morphologies could easily be observed on the Pt mesh by using an optical microscope. 직경 3.5 μm 홀 (hole)이 패터닝된 두께 30 μm인 Pt 호일에 ECR Ar 이온 밀링법을 이용하여 호흡기 질환 질병치료용 네블라이저 메쉬를 제작하였다. 기존 네블라이저 제품의 Pt메쉬 표면형상구조를 SEM을 통해 분석하였다. 광 리소그래피 공정으로 패터닝된Cu 호일에 화학적 Wet 에칭 방법으로 홀을 형성한 후 전기도금법으로 Pt 박막을 입혀서 메쉬를 제작하여 물리적 Dry에칭 방법으로 제작한 것과 비교하였다. 광 리소그래피 공정으로 홀의 직경과 피치를 각각 3.5 μm, 110 μm로 하여 패터닝된 Pt 호일을 전자사이클로트론 공명 Ar-ion 밀링을 약 10시간 동안 에칭하였다. 제작된 Pt 메쉬는 깨끗한 표면형상을 유지하면서 균일한 홀 직경인 3.5 μm 크기가 광학현미경으로 관찰되었다.
안명천,최상대,주호완,김기왕,황도근,이장로,이상석,Ahn, M.C.,Choi, S.D.,Joo, H.W.,Kim, G.W.,Hwang, D.G.,Rhee, J.R.,Lee, S.S. 한국자기학회 2007 韓國磁氣學會誌 Vol.17 No.4
어레이(away) 자성센서 개발을 위해 고진공 스퍼터링 증착장비를 이용하여 스펙큘러형(specular type) Glass/Ta(5)/NiFe(7)/IrMn(10)/NiFe(5)/$O_2$/CoFe(5)/Cu(2.6)/CoFe(5)/$O_2$/NiFe(7)/Ta(5)(nm) 거대자기저항-스핀밸브(giant magnetoresistive-spin valves; CMR-SV)박막을 제작하였다. 다층박막 시료를 $20{\times}80{\mu}m^2$의 미세 활성영역을 가진 15개 어레이를 $8{\times}8mm^2$ 영역 내에 최적화한 제작 조건으로 광 리소그래피 패터닝 하였다. Cu를 증착하여 만든 2단자 전극법으로 측정한 자성특성은 15개 모든 소자들이 균일한 자기저항특성을 나타내었고, 5 Oe 근방에서 가장 민감한 자기저항비 자장민감도와 출력전압들은 각각 0.5%/Oe, ${\triangle}$V: 3.9 mV이었다. 형상자기이방성이 적용된 상부 자유층 $CoFe/O_2/NiFe$층은 하부 고정 자성층 $IrMn/NiFe/O_2/CoFe$층 자화 용이축과 직교하였다. 측정시 인가전류 값을 각각 1 mA에서 10 mA까지 인가하였을 때 출력 작동 전압 값은 균일하게 증가하였으며, 자장감응도도 거의 일정하여 미세 외부자장에 민감한 나노자성소자로서 좋은 특성을 띠었다. To develop array magnetic sensors, specular-type giant magnetoresistive- spin valve (GMR-SV) film of Glass/Ta(5)MiFe(7)/IrMn(10)NiFe(5)/$O_2$/CoFe(5)/Cu(2.6)/CoFe(5)/$O_2$/NiFe(7)/Ta(5)(nm) was deposited by using a high-vacuum sputtering system. One of 15 way sensors in the area of $8{\times}8mm^2$ was Patterned a size of $20{\times}80{\mu}m^2$ in multilayer sample by Photo-lithography. All of 15 sensors with Cu electrodes were measured a uniform magnetic properties by 2-probe method. The highest magnetic sensitivity of MR and output voltage measured nearby an external magnetic field of 5 Oe were MS = 0.5%/Oe and ${\triangle}$V= 3.0 mV, respectively. An easy-axis of top-free layers of $CoFe/O_2/NiFe$ with shape anisotropy was perpendicular to one of bottom-pinned layers $IrMn/NiFe/O_2/CoFe$. When the sensing current increased from 1 mA to 10 mA, the output working voltage uniformly increased and the magnetic sensitivity was almost stable to use the nano-magnetic devices with good sensitive properties.
안명천(Myung-Cheon Ahn),최종구(Jong-Gu Choi),손일호(Il-Ho Son),이상석(Sang-Suk Lee),김근호(Kuen-Ho Kim) 한국자기학회 2010 韓國磁氣學會誌 Vol.20 No.3
In order to get the precise blood pressure and pulse number in the cuffless status, the wrist wearable pulsimeter with a portable and small size apparatus using by Hall device is developed. The regression analysis of the pulse wave measured by the testing product of pulsimeter is conducted two equations of the blood pressure algorithm. The estimated values of blood pressure obtained by the cuffless pulsimeter during 5 s are compared with the practical values measured by electronic or mercury liquid blood pressure meters. The standard deviation of the estimated value and the practical value for the high blood pressure and the low blood pressure were 12.1 and 5.9, respectively, which have the neighborhood values of BP International Standard. The detail analysis of a pulse wave measured by cuffless wrist wearable detecting the changes of the magnetic field can be used to develop a new diagnostic algorithm of blood pressure applying for oriental medical apparatus like as the wrist wearable pulsimeter.
ISFET 소자를 이용한 산성-중성-알칼리성 용액 내 자성나노입자 분포에 따른 pH 특성 연구
안명천(Myoung-Chone An),최종구(Jong-Gu Choi),이상석(Sang-Suk Lee) 한국자기학회 2020 韓國磁氣學會誌 Vol.30 No.2
Magnetic nanoparticles have not only been required for biological DNA isolation, detection and purification, but also have been studied steadily until recently as medical chemical processing materials for drug delivery and release that can control cancer cells in the human body. Using a ion selective field effect transistor (ISFET) pH sensor, a pH value sensitive to the concentration of hydrogen ions (H<SUP>+</SUP>) dissolved in various liquid solutions was measured according to the behavior of magnetic nanoparticles in the external magnetic field. The magnetic nanoparticle solution of pH 7.1 was mixed with acidic, neutral, and alkaline buffer solution at a ratio of 3:1, and the acidic solution having a pH of 3.9 with respect to the change of magnetic particle distribution was found to have a change of 35 mV (0.65 pH), which is greater than the pH of the alkaline solution of pH 9.8. Some of the H<SUP>+</SUP>-ions in the solution was bound to the magnetic nanoparticles and the concentration of ions was reduced near the Si₃N₄ layer of the ion sensitive membrane, so that the change in pH value, the output voltage, was closely related to the distribution of the nanoparticles. The output voltage curves between the two terminal source and drain for the external magnetic field were symmetrical around 0 Oe, and the variation up to ±1000 Oe was greater in acidic solutions than alkaline. Because a multi-reactive polymer nanoparticles containing drugs with a pH of about 7.2 for treatment of cancer cells with a pH of 6.8 move to targets, we suggest the therapy system in which the ring of nanoparticles is decomposed by high-frequency magnetic field therapy.
어레이형 FeMn 스핀밸브소자의 인가전류 값에 의존하는 자장감응도 특성 연구
김미선,안명천,김선욱,최상대,황도근,이상석,이장로 한국자기학회 2006 한국자기학회 학술연구발표회 논문개요집 Vol.16 No.1
어레이형 맥진기 센서 개발을 위해 초고진공 이온빔 스퍼터링 증착장비로부터 Glass/Ta(5)/NiFe(10)/Cu(2.6)/NiFe(7)/FeMn(10)/Ta(5) (mn) 스핀밸브 박막을 제작하였다. 다층박막 시료를 광-리소그래피 하여 최적화된 2×6 ㎛² 미세 활성영역을 패터닝 하였다. Cu를 증착하여 만든 4단자 전극법으로 측정한 자성특성은 5 Oe 근방에서 가장 민감한 자기저항비 자장감응도와 출력 전압들은 각각 0.5%/Oe, △V = 0.1 ㎷ 이었다. 형상자기이방성이 적용된 하부 자유층 NiFe층은 상부고정 자성층 NiFe/FeMn층의 자화 용이축과 직교하였다. 측정시 인가전류 값을 각각 1 ㎃, 2 ㎃, 5 ㎃, 그리고 10 ㎃ 인가하였을 때 출력 전압 값은 1:2:5:10로 균일하게 증가하였으며, 자장 감응도도 거의 일정 하였다. 안정된 외부자장에 민감한 나노자성소자로서 좋은 특성을 띠었다. 이를 바탕으로 10×10 ㎟ 내에 20개의 직접화된 소자를 제작하여 2~3 ㎝ 만큼 떨어진 피부접촉부 같은 위치에 자리잡은 영구자석이 요골동맥의 맥파 변동에 따른 공간적인 위치변화에 신호 검출을 시도하였다.
스핀밸브 바이오 센서를 이용한 혈액과 나노입자의 자성특성 검출
박상현(Sang-Hyun Park),소광섭(Kwang-Sup Soh),안명천(Myung-Cheon Ahn),황도근(Do-Guwn Hwang),이상석(Sang-Suk Lee) 한국자기학회 2006 韓國磁氣學會誌 Vol.16 No.3
In this study, a high sensitive giant magnetoresistance-spin valve (GMR-SV) bio-sensing device with high linearity and very low hysteresis was fabricated by photolithography and ion beam deposition sputtering system. Detection of the Fe-hemoglobin inside in a red blood and magnetic nanoparticles using the GMR-SV bio-sensing device was investigated. Here a human’s red blood includes hemoglobin, and the nanoparticles are the Co-ferrite magnetic particles coated with a shell of amorphous silica which the average size of the water-soluble bare cobalt nanoparticles was about 9 ㎚ with total size of about 50 ㎚. When 1 ㎃ sensing current was applied to the current electrode in the patterned active GMR-SV devices with areas of 5×10 ㎛² and 2×6 ㎛², the output signals of the GMRSV sensor were about 100 ㎷ and 14 ㎷, respectively. In addition, the maximum sensitivity of the fabricated GMR-SV sensor was about 0.1~0.8%/Oe. The magnitude of output voltage signals was obtained from four-probe magnetoresistive measured system, and the picture of real-time motion images was monitored by an optical microscope. Even one drop of human blood and nanopartices in distilled water were found to be enough for detecting and analyzing their signals clearly.