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손영수,함상용,김병인,이성휘,Son, Young-Su,Ham, Sang-Yong,Kim, Byoung-Inn,Lee, Sung-Hwee 한국전기전자재료학회 2007 전기전자재료학회논문지 Vol.20 No.11
The realization of the photoresist(PR) removal method with vaporized water and ozone gas mixture has been studied for the LCD TFT array manufacturing. The developed PR stripper uses the water boundary layer control method based on the high concentration ozone production technology. We develop the prototype of PR stripper and experiment to find the optimal process parameter condition like as the ozone gas flow/concentration, process reaction time and thin boundary layer formation. As a results, we realize the LCD PR strip rate over the 0.4 ${\mu}m/min$ and this PR removal rate is more than 5 times higher than the conventional immersion type ozonized water process.
손영수,채상훈,Son Young Su,Chai Sang Hoon 대한전자공학회 2004 電子工學會論文誌-SD (Semiconductor and devices) Vol.41 No.12
반도체 또는 평판디스플레이 제조에 있어 노광공정 후의 PR(photo-resist) 제거 공정으로서 기존의 황산기반 용액을 대체하는 고농도 오존 수 생성 기술에 대한 연구를 수행하였다. 세라믹 연면방전구조의 오존발생장치를 개발하여, 0.5[ℓ/min]의 산소 유량에서 최대 12[wt%]이상의 오존가스 농도를 얻었으며, 이를 고농도로 물과 혼합하기 위한 고효율 오존접촉장치를 개발하였다. 오존 수 생성 실험 결과, 오존가스 10[wt%]에서 80[ppm]이상의 오존 수 농도를 달성하였으며, 70[ppm]의 오존 수에서 PR 제거율 147[nm/min]의 양호한 결과를 얻었다. We have been studied on the high concentration ozonized water production technology which substitute for the SPM wet cleaning solution process as the PR strip process after the photolithography process in the semiconductor and flat panel display manufacturing. In this work, we have developed the surface discharge type ozone generator which has the characteristics of the 12 [wt%] ozone concentration at the oxygen gas flow of 0.5[ℓ/min] oxygen per cell and also developed the high efficiency ozone contactor for the mixing ozone gas with deionized water. As the production test results of the ozonized water, we obtained the ozonized water concentration above 80[ppm] at the 10[wt%] ozone gas concentration, and also had a good result of the PR strip rate of 147[nm/min]. at the 70[ppm] ozonized water.
항공기 운용 특성을 고려한 적정 운용 대수 산정 기준 연구
손영수,김성우,윤봉규,Son, Young-Su,Kim, Seong-Woo,Yoon, Bong-Kyoo 한국군사과학기술학회 2014 한국군사과학기술학회지 Vol.17 No.1
In this paper, we consider a method to access the number of aircraft requirement which is a strategic variable in national security. This problem becomes more important considering the F-X and KF-X project in ROKAF. Traditionally, ATO(Air Tasking Order) and fighting power index have been used to evaluate the number of aircrafts required in ROKAF. However, those methods considers static aspect of aircraft requirement. This paper deals with a model to accommodate dynamic feature of aircraft requirement using absorbing Markov chain. In conclusion, we suggest a dynamic model to evaluate the number of aircrafts required with key decision variables such as destroying rate, failure rate and repair rate.
손영수(Young-Su Son),함삼용(Sang-Yong Ham),채상훈(Sang-Hoon Chai) 대한전자공학회 2014 전자공학회논문지 Vol.51 No.8
실리콘 태양전지 제조에 기판으로 사용되는 156 mm 실리콘 웨이퍼의 제작 공정에 있어서 제품 불량 및 성능 저하를 유발하는 웨이퍼 표면 오염원을 분석하였으며, 이를 제거하기 위한 오존수 세정에 대하여 실험하였다. 오염물질은 웨이퍼 절단 공정에서 사용되는 슬러리 및 세척액 속에 포함된 유기물과 소잉 와이어로부터 분리된 미세입자에 의해 형성되며, 오존수 세정공정을 통하여 제거할 수 있었다. 이 기술을 적용하면 태양전지용 웨이퍼를 저렴하고 효율적이며 친환경적으로 제조할 수 있다. We have studied on ozonate water cleaning mechanisms to apply in manufacturing process of 156 mm silicon wafer which is used in the solar cell fabrication. We have analyzed contamination sources on wafer surface which causes poor quality and performance of products in fabrication process, and examined cleaning process using ozonate water to eliminate it. Contamination sources consist of remaining material like organic matter in slurry and detergent and particles in sawing wire. Using this novel technology it is possible for the solar cell wafer to clean with low cost, high performance, and eco-friendly.
반도체 감광막 제거공정 적용을 위한 고농도 오존발생장치 개발
孫永洙(Young-Su Son),咸尙龍(Sang-Yong Ham) 대한전기학회 2006 전기학회논문지C Vol.55 No.12
we have been developed on the ultra high concentration ozone generator system which is the core technology in the realization of the semiconductor photoresist strip process using the ozone-vapor chemistry. The proposed ozone generator system has the structure of the surface discharge type which adopt the high purity ceramic dielectric tube. We investigate the performance of the proposed ozone generator system experimentally and the results show that the system has very high ozone concentration characteristics of 19.7[wt%/O₂] at the flow rate of 0.3[ℓ/min] of each discharge cell. As a result of the silicon wafer photoresist strip test, we obtained the strip rate of about 400[㎚/min] at the ozone concentration of 16[wt%/O₂] and flow rate of 8[ℓ/min.]. So, we confirmed that it's possible to use the proposed high concentration ozone generator system for the ozone-vapor photoresist strip process in the semiconductor and FPD industry.
손영수 ( Young-su Son ),황선호 ( Seon-ho Hwang ),조성환 ( Seong-hwan Cho ),이광우 ( Gwang-woo Lee ),김종성 ( Jong-sung Kim ) 한국정보처리학회 2011 한국정보처리학회 학술대회논문집 Vol.18 No.2
21세기 초부터 휴대폰으로 인터넷에 접속하는 다양한 서비스가 제공되었으며 스마트폰 사용량은 급증하였고 위협요소 또한 많아졌다. 본 논문은 스마트 폰을 위협하는 악성코드의 종류와 감염경로를 파악하고 그 사례를 통해 문제점을 제시한다.
손영수(Son Young-Su),함상용(Ham Sang-Yong),최혁진(Choi Hyuek-Jin),오상우(Oh Sang-Woo) 한국해양환경·에너지학회 2006 한국해양환경공학회 학술대회논문집 Vol.2006 No.-
침몰선박 잔존유 무인회수시스템을 선상에서 운용 및 제어하기위한 원격제어시스템을 개발하였다. 개발한 원격제어시스템은 잔존유 회수시스템을 구성하는 각종 액츄에이터 구동 및 제어기능, 수중에서의 무인회수시스템 작업상황 모니터링 기능 그리고 수중 회수작업의 촬영 및 영상 전송/저장 기능을 수행하도록 설계하였다. 제작한 원격제어시스템으로 실 해역에서의 무인 회수작업 실시결과 설계한 제반 기능을 완벽히 수행함으로써 개발한 원격제어시스템의 효용성을 확인하였다. we have been developed on the onboard remote control system for the operation and control of the remotely operated oil recovery system from sunken ship . The remote control system was designed to perform the operation and control of the several hydraulic and electric actuators, monitor the underwater oil recovery work and equipment status, and transfer the video image of the oil recovery work to the onboard Pc. As a result of the sea performance test with the developed remote control system, we confirmed that all of the functions of the oil recovery system was carried out successfully by control of the onboard remote control system.