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서지근,김상현 한국물리학회 2015 새물리 Vol.65 No.6
기울어진 각도증착 (GLAD)에 의한 성장 형태를 증착원자의 궤적을 계산하는 분자동역학 (MD) 프로그램을 결합한 운동학적 몬테카를로 (KMC) 시뮬레이션을 통하여 고찰하였다. 제한된 하강확산 (RDF) 모형과 같이 증착원자의 매달린 (overhang) 상태를 허용하는 모형만이 막대형 구조물 형성이 가능함을 시뮬레이션 계산으로 확인하였다. 그러나 막대형 구조물의 형성은 매달린 증착 원자의 하강 확산장벽의 크기와는 무관함을 보았다. GLAD에 의한 막대형 구조물은 낮은 온도 또는 낮은 증착원자 속력과 같은 확산이 제한된 증착 조건에서 쉽게 형성되었다. 또한 높은 슈봐벨 장벽 값이나 높은 모서리 장벽 값을 가진 물질계의 GLAD 증착이 막대형 성장을 잘 만드는 것을 확인하였다. The growth characteristics of glancing angle deposition (GLAD) are studied by using kinetic Monte Carlo (KMC) simulations in conjunction with molecular dynamics (MD) analyses of the deposited atoms to account for the steering effect. Columnar structures can be reproduced through simulations based on the restricted downward funneling (RDF) model wherein deposited atoms can be trapped on overhang positions. However, the appearance of a columnar structure is not connected with the size of the downward funneling diffusion barrier of the overhang atom. The columnar structures grown by using GLAD can easily be produced under the deposition conditions of restricted diffusion, such as a low temperature or a low speed of the deposited atom. We also confirmed that the GLAD of a material system with a high Schwoebel barrier or a high cornerrounding diffusion barrier led to columnar structures.
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서지근,김재성,Seo J.,Kim J.S. 한국진공학회 2006 Applied Science and Convergence Technology Vol.15 No.4
The dynamic effects, such as the steering and the screening effects during deposition on an epitaxial growth is studied by kinetic Monte Carlo simulation. In the simulation, we incorporates molecular dynamic simulation to rigorously take the interaction of the deposited atom with the substrate atoms into account, We find three characteristic features of the surface morphology developed by grazing angle deposition: (1) enhanced surface roughness, (2) asymmetric mound, and (3) asymmetric slopes of mound sides, Regarding their dependence on both deposition angle and substrate temperature, a reasonable agreement of the simulated results with the previous experimental ones is found. The characteristic growth features by grazing angle deposition are mainly caused by the inhomogeneous deposition flux due to the steering and screening effects, where the steering effects play the major role rather than the screening effects. Newly observed in the present simulation is that the side of mound in each direction is composed of various facets instead of all being in one selected mound angle even if the slope selection is attained, and that the slope selection does not necessarily mean the facet selection.
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