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STD61 기판위에 이온 플레이팅법으로 증착된 CrN 박막의 고온산화 거동
이종권,이상로,백운승,이찬규,권두용 대한금속재료학회(대한금속학회) 1996 대한금속·재료학회지 Vol.34 No.9
To improve the high temperature oxidation resistance of STD61 steel used as hot dies or cutting tools, CrN films of single phase with the (111) preferred orientation which were deposited on STD61 steel substrates by arc ion plating. The oxidation characteristics of CrN films were studied at the temperatures, ranging from 800 to 950 ℃ in air(70sccm) by employing thermogravimetry. XRD, SEM and EPMA The high temperature oxidation resistance of STD61 steel was improved by the CrN films. The oxidation of CrN films follows nearly parabolic rate laws and the activation energy of oxidation was 206 kJ/㏖ at the temperatures ranging from 800 to 950℃. According to the marker test using Al₂O₃, particles, the conclusion of investigation for the interface migration of oxide was that the growth of oxide(Cr₂O₃) is controlled by external diffusion of cation(Cr ion)
Ni 중간층이 형성된 ZrN 코팅층의 밀착성, 경도 및 내마모성에 관한 연구
예길촌,권식철,백운승,신현준 대한금속재료학회(대한금속학회) 1995 대한금속·재료학회지 Vol.33 No.3
ZrN coatings were deposited on tool steel(SKH9) with the interlayer of Ni by a reactive D.C. magnetron sputtering. The microhardness, adhesion strength and wear-resistance of the films were investigated with microhardness tester, scratch tester, pin-on-disk method respectively. ZrN coatings were deposited with the condition of partial pressures of N2 gas(4∼10x10-4mbar) and the substrate bias voltage(0∼250V). The microhardness decreased from HV 1050 ㎏/㎜2 to HV 1000㎏/㎜2 as the thickness of Ni interlayer increased from 0.2 ㎛ to 1.3 ㎛. The adhesion strength of the Ni/ZrN double-layered coatings were 22N in the scratch test and it was four times higher than that of ZrN mono-layered coatings. The failure mode of the double-layered coatings was changed from the cohesive at the initial stage to the adhesive failure in the later stage of the failure. The wear-resistance of the Ni/ZrN double-layered coatings increased nearly twice as high as that of the ZrN mono-layered coatings.
공구강에 스퍼터증착된 지르코늄질화물 코팅층의 경도와 밀착성에 대한 연구
신현준,예길촌,권식철,백운승 대한금속재료학회(대한금속학회) 1993 대한금속·재료학회지 Vol.31 No.6
ZrN and Zr/ZrN layers were deposited on tool steel(SKH9) by a reactive DC magnetron sputtering technique and their microhardness and adhesion strength were measured for the films processed by changing the partial pressur of N₂gas(4∼10×10^(-4)mbar) and the substrate bias voltage(0∼250V). The adhesion strength was evaluated by acoustic signals through the scratch-test with the incremental applied load. As the bias voltage was applied, the adhesion strength of the films was observed five times as strong as that obtained without bias voltage. The adhesion strength of the Zr/ZrN doublelayered structure was measured to 20∼24N and it was deposited two times as strong as that in the monolayered Zr interlayer increased about twice more than that of the load of ZrN monolayered structure ZrN(10N). The microhardness of the ZrN film was shown to be Hv 1800Kg/㎟ when the bias boltage was 200V and the partial pressure was N₂4×10^(-4)mbar. From the failure mode on the film during scratch adhesion test, it was found that the adhesive failure was observed in the ZrN monolayer and the cohesive failure was found in the Zr/ZrN doublelayed structure.