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김동영(Dong-Yeong Kim),김건(Geon Kim),박진효(Jin-Hyo Park),김수연(Su-Yeon Kim),박제원(Je-Won Park),이명진(Myoung-Jin Lee) 대한전자공학회 2022 전자공학회논문지 Vol.59 No.6
저전력 고집적 메모리 반도체의 발전을 위해 센스앰프의 오프셋을 감소시키는 것이 중요하다. 본 논문에서는 오프셋에 의한 sensing fail rate를 감소시키기 위해 Separated Driving-node Sense Amplifier (SDSA)를 제안하였다. Conventional VLSA에서 구동 라인을 분리하여 동작하는 방법으로 0.9V, 동일한 면적에서 sensing fail rate는 70% 이상 감소하고, 면적 증가에 따른 sensing fail rate 감소 효과는 15% 이상 상승하였다. It is important to reduce the offset of the sense amplifier for the development of low power and high memory semiconductors. In this paper, we propose a Separated Driving-node Sense Amplifier (SDSA) to reduce the sensing failure rate by offset. As a method of separating a drive line in a conventional VLSA, the sensing failure rate in the same area at a low voltage of 0.9V is reduced by 70% or more. Moreover, the effect of reducing the sensing failure rate by increasing the area is increased by 15% or more.
국소면적 근전도 신호 측정을 위한 PEDOT:PSS 기반 유연 마이크로전극 어레이
최형준(Hyung Jun Choi),김경민(Kyung Min Kim),양우진(Woo Jin Yang),박제원(Je Won Park),박동욱(Dong-Wook Park) 대한전자공학회 2020 대한전자공학회 학술대회 Vol.2020 No.11
In this work, we propose a poly(3,4-ethylenedioxythiophene) polystyrene sulfonate (PEDOT:PSS) based flexible branched electromyography (EMG) sensor for detecting small-area EMG signal from curved skin. By using semiconductor fabrication process, we fabricated a miniaturized 16-channel multielectrode sensor that can record small-area EMG. In general, platinum (Pt) and other metals were used as the electrode material of the EMG sensor. However, by substituting Pt with solution-processible PEDOT:PSS, the sensor arrays could be made cost-effectively while maintaining the impedance of the electrode. We also applied aluminum (Al) hard mask process instead of photoresist (PR) when etching the Parylene C encapsulation layers. This approach also makes the fabrication process simple by reducing the number of photomasks and increasing the process window of polymer dry etching. The sensor was fabricated on flexible and biocompatible Parylene C substrate so that it can detect the surface electromyography(sEMG) from curved skin surface. The recorded EMG signals were analyzed through fast fourier transform(FFT) and power spectral density (PSD) verifying that the flexible branched EMG sensor can record the multi-channel signals in small-area.