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Planarization of Wafer Edge Profile in Chemical Mechanical Polishing
박영봉,정해도,정호빈,최성하 한국정밀공학회 2013 International Journal of Precision Engineering and Vol.14 No.1
Within wafer non-uniformity (WIWNU), which significantly affects the yield of chip products, is mainly caused by non-uniform chemical mechanical polishing (CMP) at the wafer’s edge. This study investigates the origins of the non-uniformity and presents a process that uses an edge profile control ring (EPC ring) to solve the problem. The EPC ring is designed to be positioned between the wafer and the retaining ring and pressed at the same pressure as the wafer by a flexible membrane to reduce the pressure discontinuity between the center region and the edge region of the wafer. Experimental results show that for a WIWNU of 2%, the EPC ring makes it possible to shrink the edge exclusion region from 15 mm to 2 mm without any change in process conditions. This result suggests that the EPC ring is applicable to real fabrication.
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신생아 제대혈에 있어서 Alphafetoprotein 치와 Bilirubin 치에 관한 연구
박영봉,나창수 朝鮮大學校 附設 醫學硏究所 1989 The Medical Journal of Chosun University Vol.14 No.1
Alpha-fetoprotein(AFP) is a major plasma protein synthesized by the fetal liver, york sac, and gastrointestinal tract. There were many reports that elevated AFP levels in maternal serum and amniotic fluid have been associated with fetal distress and intrauterine fetal death, and recent studies demonstrates a high association between elevated AFP levels in maternal serum and umbilical cord blood and subsequent neonatal jaundice in normal healthy fullterm infants. To investigates the relationship between serum AFP and bilirubin levels of the newborn infants, the authors determind maternal serum and umbilical cord blood AFP concentration in 26 cases of normal healthy fullterm infants and their mothers, The serum AFP levels were measured by the method of enzyme immunoassay(AFP-EIA kit, USA) The results observed are summerized as follows: 1. The mean serum AFP levels of the newborn infants and their mothers were 27227.285ng/㎖ and 161.09ng/㎖, respectively and there was significant correlation between serum AFP levels of the newborn infants and their mothers, (Y= 14.598x+25646.955, r=0.1627, P<0.1627, p<0.005) 2. The mean serum AFP levels of the mothers and mean serum bilinibin levels of the newborn infants were 161.09ng/㎖ and 1.19ng/㎖, respectively and there was significant correlation between serum APP levels of the mothers and serum bilirubin levels of the newborn infants (Y=0.000032x+0.2831, r=0. 272491, P<0.005)
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