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수중 환경에서의 다이아몬드상 카본 필름의 마찰마모 거동
이진우(J. W. Yi),박세준(S. J. Park),이승환(S.-H. Lee),문명운(M.-W. Moon),이광렬(K.-R. Lee),김정구(J.-G. Kim),김석삼(S.-S. Kim) 한국생산제조학회 2007 한국공작기계학회 추계학술대회논문집 Vol.2007 No.-
Tribological behavior of diamond-like carbon(DLC) films was investigated in aqueous environment. DLC films were deposited on Si(100) and polished SUS 316L substrates by r.f.-PACVD using mixture precursor gas of benzene and hydrogen. The fraction of H₂ in the mixed precursorgas was varied in the range from 0 to 2.0. The wear test was conducted under dry and aqueous condition using a home-made ball-on-disc type wear rig. Adhesive wear due to the delamination of the DLC coating in aqueous environment significantly decreased as the H₂ fraction in the precursor gas increased.