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마용원,박준한,윤단희,곽청렬,신보성 한국마이크로전자및패키징학회 2019 마이크로전자 및 패키징학회지 Vol.26 No.2
The newly discovered properties of periodic nanoscale patterns have increasingly sparked research interests in various fields. Along this direction, it is worth mentioning that there had been rare studies conducted on interference exposure, a method of creating periodic patterns. Additionally, these few studies seemed to validate the existence of only exact quadrangle shapes and dot patterns. This study asserted the formation of wavy patterns associated to using multiple exposures of the ratio of the first exposure intensity to the second exposure intensity. Such patterns were designed and constructed herein via overlapping of two Gaussian beams relative to certain rotation angles, and with a submicron structure fabricated based on a 360-nm continuous-wave laser. Results confirmed that the proposed double exposure laser interference lithography is able to create circular, elliptical and wavy patterns with no need for complex optical components.
A Method for Fabricating a Micro-structured Surface of Polyimide with Open and Closed Pores
마용원,오재용,안석영,신보성 한국물리학회 2016 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.69 No.3
A new approach for fabricating open and closed porous structures based on laser processing is presented. Liquid polyimide (PI) was mixed with azodicarbonamide which is a chemical blowing agent (CBA), and the mixture was spin-coated and pre-cured in order to fabricate solid PI films. Porous PI was prepared by irradiating PI films mixed with azodicarbonamide. The PI film with azodicarbonamide was etched by using laser ablation, and the azodicarbonamide was decomposed due to the heat induced by the absorbed laser energy. At higher laser beam irradiation, more pores were fabricated due to the resulting increase in the CBA decomposition from 27 mJ/cm2 to 40 mJ/cm2 per single pulse. A fluence of about 50 mJ/cm2 resulted in fewer and larger open pores, which were formed by the coalescence of small pores. In contrast, a closed porous structure was fabricated at a fluence of less than 1 mJ/cm2 because PI was barely etched. The proposed method can be used to create open and closed porous structures selectively and is not limited to thermosetting polymers, but is also effective with thermoplastic polymers.
마용원,Myung Yung Jeong,Sang-Mae Lee,Bo Sung Shin 한국물리학회 2016 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.68 No.5
A new approach for fabricating a high-density nano-porous structure on polyimide (PI) by using a 355-nm UV laser is presented here. When PI was irradiated by using a laser, debris that had electrical conductivity was generated. Accordingly, that debris caused electrical defects in the field of electronics. Thus, many researchers have tried to focus on a clean processing without debris. However, this study focused on forming a high density of debris so as to fabricate a nano-porous structure consisting of nanofibers on the PI film. A PI film with closed pores and open pores was successfully formed by using a chemical blowing agent (azodicarbonamide, CBA) in an oven. Samples were precured at 130 C and cured at 205 C in sequence so that the closed pores might not coalesce in the film. When the laser irradiated the PI film with closed pores, nanofibers were generated because polyimide was not completely decomposed by photochemical ablation. Our results indicated that a film with micro-closed pores, in conjunction with a 355-nm pulsed laser, can facilitate the fabrication of a high-density nano-porous structure.
화학적 발포와 레이저 하이브리드 공정을 이용한 마이크로 셀루러 폴리이미드 필름 제조
마용원(Yong Won Ma),강문석(Moon Suk Kang),오재용(Jae Yong Oh),신보성(Bo Sung Shin) 한국기계가공학회 2013 한국기계가공학회지 Vol.12 No.6
Recently, microcellular polymer films have been widely used as absorbents, support cells, and sensors in the industrial fields of IT, NT, BT, and ST. The conventional fabrication methods of microcellular polymer films are not only more complicated than those of non-microcellular polymer films, but also require a longer production time. In this paper, we propose a new hybrid fabrication method for microcellular polymer films; films can be rapidly made using UV laser processing with chemical blowing agents. The experimental results show that the number of the micropores increased with respect to the laser fluence and the concentration of the chemical blowing agents.
Micronanofabrication for Optofluidic Sensors
이상매,마용원 한국물리학회 2015 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.67 No.12
This paper reviews optical waveguide Bragg grating sensors integrated with a microfluidic chip. Optical Bragg gratings are inscribed in optical fibers and optical planar waveguides comprised of core and cladding layers in order to guide a single mode of light. Optical fiber Bragg gratings (FBG) are currently among the most popular of all fiber-based optical sensors for analyzing parameters such as the load, strain, temperature, vibration, and refractive index (RI) in wavelength-encoded systems; thus, it has a huge potential for sensing biomedical and chemical, as well as physical and mechanical, measurands.