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마그네트론 스퍼터링 시스템의 방열 성능 향상에 관한 연구
백재상(Jae-Sang Baek),김태안(Tae-An Kim),김윤제(Youn-Jea Kim) 한국유체기계학회 2006 유체기계 연구개발 발표회 논문집 Vol.- No.-
Magnetron Sputtering system is used extensively for thin-film deposition to a wide variety of commercial and scientific purposes, such as making ultra-thin semiconductors, metal films, etc. It plays important role in a coating system. One of the problems to improve the performance of magnetron sputtering system is the enhancement of heat transfer at the source target. High voltage and electric current are furnished to the source target in order to get the uniform deposition. That energy is converted to heat, which must be removed by the efficient cooling system. Otherwise, it may damage the target, magnets, and substrate as well. Therefore, in order to maintain the uniform deposition, the design of effective cooling system is important. The main parameters affecting the cooling performance are the flow path of cooling water, inlet size and flow rate, etc. In this study, the flow characteristics of inside cooling system with various flow paths of cooling water and flow rates are investigated and results are graphically depicted.
노즐 형상변화에 따른 HVOF 용사총에서의 유동특성에 관한 수치적 연구
백재상(Jae-Sang Baik),김윤제(Youn-Jea Kim) 대한기계학회 2007 대한기계학회 춘추학술대회 Vol.2007 No.5
HVOF thermal spray guns are now being widely used to produce protective coatings, on the surfaces of engineering components. HVOF technology employs a combustion process to heat the gas flow and melt the coating materials which are particles of metals, alloys or cermets. Particle flow which is accelerated to high velocities and combustion gas stream are deposited on a substrate. In order to obtain good quality coatings, the analysis of torch design must be performed. The reason is that the design parameters of torch influence gas dynamic behaviors. In this study, numerical analysis is performed to predict the gas dynamic behaviors in a HVOF thermal spray gun with various torch shapes. The CFD model is used to deduce the effect of changes in nozzle geometry on gas dynamics. Using a commercial code, FLUENT which uses Finite Volume Method and SIMPLE algorithm, governing equations have been solved for the pressure, velocity and temperature distributions in the HVOF thermal spray torch.