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FHD(Flame Hydrolysis Deposition)공정으로 제작된 SiO<sub>2</sub> 광도파막의 분광학적 분석
김윤제,신동욱,Kim, Yun-Je,Shin, Dong-Wook 한국세라믹학회 2002 한국세라믹학회지 Vol.39 No.9
FHD(Flame Hydrolysis Deposition)공정은 화염 형성에 관여하는 장비의 조건들과 그에 따른 다양한 공정인자에 의하여 박막의 조성이 결정되며, 증착된 막을 치밀화하는 첨가물의 증발로 인해 열처리공정에서 조성이 변화되므로 공정인자로부터 최종적인 광도파막의 조성을 예측하는 것은 매우 어렵다. 본 연구에서는 FHD 공정에서 첨가가스의 유량을 제어하여 박막의 조성 및 광학적 특성을 예측할 수 있는 공정 분석의 기초자료를 제공하기 위하여 FTIR(Fourier Transformation Infrared Spectroscopy)측정과 ICP-AES(Inductively Coupled Plasma-Atomic Emission Spectrometry)측정을 통해 실리카 막의 조성분석에 대한 연구를 수행하였다. FTIR 흡수 스펙트럼을 통해 실리카 막에 존재하는 Si-O, B-O band를 측정하고 정성적 농도변화를 관찰 하였고, ICP-AES를 통해 Boron의 농도를 정량적으로 측정하였다. 이 두 결과로부터 FTIR을 이용한 정량적 조성분석의 기초자료인 B-O band의 흡광계수를 구하였다. Since many process parameters of FHD(Flame Hydrolysis Deposition) are involved in forming multi-component amorphous silica film ($SiO_2-B_2O_3-P_2O_5-GeO_2$), it has not been easy to predict the optical, mechanical and thermal properties of deposited film from the simple process parameters, such as source flow rate. Furthermore, the prediction of final composition of film becomes even more difficult after sintering at high temperature due to the evaporation of volatile dopants. The motivation of the study was to clarify the quantitative relationship between simple process parameters such as the flow rate of source gases and resulting chemical composition of sintered film. Hence, the compositional analysis of silica soot by FTIR(Fourier Transformation Infrared Spectroscopy) and ICP-AES(Inductively Coupled Plasma-Atomic Emission Spectrometry) under the control of the amount of dopant was carried out to obtain the quantitative composition. By measuring spectrum of absorbance from FTIR, the compositional change of B-O, Si-O, OH($H_2O$) in silica film was measured. The concentrations of these dopants were also measured by ICP-AES, which were compared with the FTIR result. The final quantitative relationship between simple process parameters and composition was deduced from the comparison between two results.
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Influence of On-Stage Control Parameters on Patterning in the Focused Ion Beam Deposition Process
김윤제,김준현 한국물리학회 2008 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.53 No.5
This paper describes the interaction of the operation parameters during the focused ion beam (FIB) deposition process using an organo-metallic (C) precursor gas. Under the fine beam condition (30 kV, 40 nm beam size, etc.), the in fluences of the on-stage control parameters, such as the dwell time, beam overlap, incident beam angle relative to the tilted surface, minimum frame time and pattern size, on the FIB micro-deposition process were investigated by using deposition tests based on the design of five factors and four levels of L16(45). The process analysis was examined with respect to the deposited dimensions and the shapes of the single- pattern. Throughout the singlepatterning process, optimal conditions were selected. Additional procedures for multi-patterning deposition are presented to show the effect of on-stage parameters on the processing results. The analysis provided the sequential beam scan method and the aspect-ratio had the most significant in uence on FIB processing in multi-patterning deposition. The bit-mapped scan method was more efficient than the one-by-one scan method for obtaining a high-aspect ratio (height/width > 1) patterns. In the nano-scale gap, the one-by-one scan method and optimized conditions were required for successful modifications. This paper describes the interaction of the operation parameters during the focused ion beam (FIB) deposition process using an organo-metallic (C) precursor gas. Under the fine beam condition (30 kV, 40 nm beam size, etc.), the in fluences of the on-stage control parameters, such as the dwell time, beam overlap, incident beam angle relative to the tilted surface, minimum frame time and pattern size, on the FIB micro-deposition process were investigated by using deposition tests based on the design of five factors and four levels of L16(45). The process analysis was examined with respect to the deposited dimensions and the shapes of the single- pattern. Throughout the singlepatterning process, optimal conditions were selected. Additional procedures for multi-patterning deposition are presented to show the effect of on-stage parameters on the processing results. The analysis provided the sequential beam scan method and the aspect-ratio had the most significant in uence on FIB processing in multi-patterning deposition. The bit-mapped scan method was more efficient than the one-by-one scan method for obtaining a high-aspect ratio (height/width > 1) patterns. In the nano-scale gap, the one-by-one scan method and optimized conditions were required for successful modifications.
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Comparison of Turbulence Models for a Free-burning High-intensity Argon Arc
김윤제,이종철 한국물리학회 2013 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.62 No.9
Free-burning arcs where the work piece acts as an anode are frequently used for a number of industrial applications. Our investigation was concerned with developing a capability to model free-burning high-intensity argon arcs and enhancing the accuracy of numerical results according to a comparative study of turbulence models. For the arc modeling involved complicated interactions between the flow and electromagnetic fields, we modified the Navier-Stokes equations to take into account the radiation transport, the electrical power input and the electromagnetic driving forces with the relevant Maxwell equations. For the turbulence modeling, which is critical to the arc edges due to a steep temperature gradient between the arc column and the surrounding gas, zero- and twoequation eddy-viscosity models were used. The major arc parameters of temperature, axial velocity,electric potential difference and pressure-rise from ambient atmospheric pressure were summarized under laminar and turbulent conditions. It was found that the standard k-ε model modified to take into account the effect of a steep temperature gradient at the edge of free-burning arcs could predict reasonable temperature profiles better than the cases with the assumption of laminar flow and Prandtl’s mixing length model used for switching arcs.
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김윤제,이상엽,이성룡 成均館大學校 科學技術硏究所 1997 論文集 Vol.48 No.1
Supersonic viscous flows in minimum length nozzle(MLN) are studied numerically, using the Navier-Stokes equation. With the help of the method of characteristics(MOC) for the fixed exit Mach number of two, the modelled supersonic wall contours for two-dimensional, axisymmetric, curved sonic line(CSL) are derived. These wall contours are combined with subsonic inlets to determine the influence of the inlet geometry on the sonic line shape and flowfields. Representative nozzle flowfields, including the boundary layer separation and oblique shock waves are shown for different inlet geometry for laminar flows. These numerical results are compared to the analytical prediction with good agreement.
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김윤제 한국외국어대학교 철학과문화연구소 2010 철학과 문화 Vol.20 No.-
이 글의 목적은 베르그송의 철학에서 직관이 갖고 있는 고유함을 드러내는 것이다. 잘 알려져 있듯, 베르그송의 철학은 이전의 철학이 시간을 공간화를 통해 파악한 것을 비판하며, 이에 대해, ‘지속’이라는 실재적 시간을 회복을 시도하는 철학이라 할 수 있다. 그럼에도 불구하고 베르그송의 지속에 대해 숙고하고자 할 때, 지속에 어떻게 도달할 수 있는지에 대한 물음이 제기된다. 베르그송에 따르자면, 지속은 그 자체가 순수한 운동이며 변화이고, 그렇기에 이질적인 것들 자체이다. 따라서 지속은 그것의 외부를 돌면서는 파악될 수 없으며, 이러한 접근은 오히려 실재적 시간으로서 지속을 다시금 공간화 시켜버릴 뿐이다. 베르그송의 직관이 갖는 독특성은 이러한 철학적 숙고에서 드러난다. 여기서 우리는 베르그송의 직관이 갖는 독특함을 철학사적 접근을 통해, 특히 세계의 인식에 집중했던 근대철학자들이 직관을 어떻게 파악해왔는지, 그리고 그들의 입장에 대한 베르그송의 전반적인 비판은 무엇인지를 검토하면서 그 독특함을 드러내고자 한다. 이러한 비판은 자연스럽게 지성과 직관의 관계로 이끌린다. 이전의 철학자들이 시간을 파악함에 있어서 비번하게 사요했던 방식은 모든 것을 공간화시키는 지성에 의한 것이기 때문이다. 베르그송에게 있어 지성은 제작인(homo faber)으로서 인간을 잘 드러내는 역능이다. 지성은 인간의 생존을 도우며, 도구의 제작을 통해 인간을 물질의 지배자로 만든다. 사실 지성은 유용성에 입각해 있으며, 베르그송은 이러한 지성은 지속을 파악하기 위해 그것을 자신에게 용이하게 바꾸고자 하며 이러한 결과가 지속의 공간화라 본다. 지성과 달리 직관은 무관심한 본능이며, 지속에 직접 침투하는 것이다. 직관은 항상 운동하여, 변화하는, 그리고 이질성인 지속에 직접 닿는 것이기에 섬세의 역능이다. 결국 지속에 침투하는 직관을 자신의 철학에 있어 주요한 위치에 정립하면서 베르그송의 철학은 총체적인 경험주의, 미래성을 향한 철학이라는 고유한 특징을 드러낸다. 그리고 이야말로 베르그송의 철학 내에서 직관이 갖는 함축이다. A purpose of this article is to manifest a characteristic of the intuition in Bergson's philosophy. As well known, Bergson's philosophy criticizes a former philosophy that grasps the time by spatializing the time. On the contrary, it is a philosophy that attempts to restore the duration(la durée) as a real time. But when we try to consider the duration, it makes a problem. 'How can we reach to the duration?" According to Bergson, the duration is pure movement, pure variation, so that it is the heterogeneous itself. For tills reason, the duration is not grasped by going around the outside of it, and it just spatializes again the duration. A characteristic of the intuition in Bergson's philosophy appears this philosophical deliberation. In this article, this characteristic will be manifested by the historical access of philosophy. Especially we will see a notion of intuition of some modern philosophers who concentrate on the cognition of the world, and Berson's critique to them. This critique is leaded to the relation between the intelligence and the intuition. To cognize the time, former philosophers use the intelligence what spatializes everything. On Bergson's philosophy, the intelligence is capability that makes homo faber of human. It helps human to survive, it makes a dominator of human. The intelligence in fact, is based on the utility, Bergson understands this intelligence as a agency of the spatializing of time, because it easily modifies the duration for grasp of the duration. Unlike the intelligence, the intuition is an disinterested instinct, it permeates directly the duration. And it reaches the duration that always moves, changes, so that it is capability of fineness. After all, to posing the intuition what permeates the duration for a principal position, the philosophy of Bergson manifests the integral empiricism and the philosophy toward futurity as proper characters. And this is the philosophical implication of the intuition in Bergson's philosophy.
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