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TiS$i_2$ 박막의 열안정성에 미치는 막 스트레스의 영향
김영욱,김영욱,고종우,이내인,김일권,박순오,안성태,이문용,이종길,Kim, Yeong-Uk,Kim, Yeong-Uk,Go, Jong-U,Lee, Nae-In,Kim, Il-Gwon,Park, Sun-O,An, Seong-Tae,Lee, Mun-Yong,Lee, Jong-Gil 한국재료학회 1993 한국재료학회지 Vol.3 No.1
단결정 실리콘위에 스퍼터법으로 증착된 티타니움막을 급속가열로에서 고상반응에 의해 형성시킨 면저항 1.2 ohm/sq. 내외의 TiS$i_2$ 박막에 있어서 열안정성을 상부절연막의 유무 및 종류에 따라 조사하였다. 상부절연막은 상압 CVD로 증착한 USG(Undoped Silicate Glass, Si$i_2$) 막과 플라즈마 CVD법으로 증착한 PE-SiN(S$i_3$$N_4$)막을 사용했다. 열안정성 평가는 90$0^{\circ}C$에서 시간을 달리하여 TiS$i_2$막, PE-SiN막, USG막의 스트레스는 각각 1.3${\times}{10^{9}}$, 1.25 ${\times}{10^{10}}$, 2.26 ${\times}{10^{10}}$ dyne/c$m^2$의 인장응력을 나타내었다. 응집현상은 TiS$i_2$의 응집현상은 Nabarro-Herring 마이크로 크리프에 의한 원자의 확산관점에서 검토되었다. Abstract The effect of the film stress on the thermal stability of TiSi, films under the dielectric overcoat was investigated. TiS$i_2$ films with the sheet resistance of 1.2 ohm/sq. were produced by a solid-state reaction between sputtered Ti film and single-crystalline Si in an RTA (rapid thermal anneal) machine. Dielectric overcoats such as the USG (Undoped Silicate Glass, Si$O_2$) film and the PE-SiN(S$i_3$$N_4$) film were deposited by AP-CVD and PE-CVD, respectively, on the TiS$i_2$ film. The thermal stability of the TiSi, film was evaluated by changes in the sheet resistance, film stress and microstructure after furnace anneals at 90$0^{\circ}C$. Agglomeration of the TiSi2 film high temperatures results in the increase of sheet resistance and the decrease of tensile stress of TiSi, film. The stress level of the TiSi" PE-SiN and ~SG films at 90$0^{\circ}C$C was 1.3${\times}{10^{9}}$, 1.25 ${\times}{10^{10}}$, 2.26 ${\times}{10^{10}}$ dyne/c$m^2$ in tensile, respectively. Dielectric films deposited by CVD on TiSi, was effective on preventing agglomeration of TiSi,. The PE-SiN film mproved the thermal stability of TiSi, more effectively than the AP-CVD USG film. It is considered that agglomeration of the TiS$i_2$ film under the stress of dielectric overcoat at high temperature can be caused by a diffusional flow of atom called Nabarro-Herring microcreep.reep.
김영욱,함승경,최지명,김혜정 한국커뮤니케이션학회 2020 커뮤니케이션학연구 Vol.28 No.4
This study explores hate-related discourses displayed in South Korean media reports by analyzing articles from four major newspapers published over 17 years, from January 2003 to May 2019. The analysis took into account topics that appeared most prominently between January 2003 and May 2019, the differences in topics that newspapers presented based on their political orientations, and the changes in the topics t hey considered o ver the 17 years. 19 t hemes were c lustered w ith common attributes, and as a result, they were grouped into four major subgroup themes. These four subgroups consist of, 1) political issues, 2) discrimination issues, 3) gender issues, and 4) NIMBY issues. The results help us understand current hate-related discourses in South Korea and suggest theoretical implications for future empirical validations and clues for overcoming the current problem from a discursive perspective.
김영욱 한국제품안전협회 1996 제품안전 Vol.45 No.-
미국의 프록터 앤 갬블사(P&G)에 다니는 임직원들은 감원을 전혀 걱정하지 않는다. 물론 회사에서 잘리는 것을 좋아할 사람이야 전혀 없겠지만 잘려도 다른 직장을 쉽게 구할 수 있기 때문에 해고를 자연스럽게 받아들인다고 하더라도 해고가 당사자에게주는 충격은 아주 크다. 따라서 직원에 대한 고과가 엄정하고 평가가 정확하다고 하더라도 뒷공론이 없을 수 없다.