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RISS 인기검색어
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- 저자 : 권상직 (검색결과 122 건)
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유기발광 다이오드의 정공수송층 두께에 따른 미소 공진 효과의 영향에 관한 연구
권상직,이동운,조의식,성진욱 한국반도체디스플레이기술학회 2022 반도체디스플레이기술학회지 Vol.21 No.1
Top emission organic light-emitting diode is commonly used because of high efficiency and good color purity than bottom – emission organic light-emitting device. Unlike BEOLED, TEOLED contain semi-transparent metal cathode. Because of semi-transparent cathode, micro cavity effect occurs in TEOLED. We optimized this effect by changing the thickness of hole injection layer. Device consists of is indium-tin-oxide / N,N'-Di-[(1-naphthyl)-N,N'-diphenyl]-1,1'-biphenyl-4,4'-diamine (x nm) / tris-(8-hydroxyquinoline) aluminum (50nm) / LiF(0.5nm) / Mg:Ag (1:9), and we changed NPB thickness which is used as HTL in our device in order to study how micro cavity effects are changed by optical path. As the results, NPB thickness at 35nm showed the current efficiency of 8.55Cd/A.
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ALD 장비의 Al2O3 공정 안정화를 위한 저온 트랩 장치의 특성 평가
권상직,서용혁,이원우,김인환,한지은,이연주,조재효,전용민,조의식 한국반도체디스플레이기술학회 2024 반도체디스플레이기술학회지 Vol.23 No.1
The application of the technology for forming Al2O3 thin films using ALD(atomic layer deposition) method is rapidly increasing in the semiconductor and display fields. In order to increase the efficiency of the ALD process in a mass production line, metallic by-products generated from the ALD process chamber must be effectively collected. By collecting by-products flowing out of the chamber with a cold trap device before they go to the vacuum pump, damage to the vacuum pump can be prevented and the work room can be maintained stably, resulting in increased process flow rate. In this study, a cold trap was installed between the ALD process chamber and the dry pump to measure and analyze by-products generated during the Al2O3 thin film deposition process. As a result, it was confirmed that Al and O elements were discharged, and the collection forms were two types: bulk and powder. And the binding energy peaked at 73.7 ~ 74.3 eV, the binding energy of Al 2p, and 530.7 eV, the binding energy of O 1s, indicating that the binding structure was Al-O.
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진공에서 소성 가능한 프릿을 이용한 평판디스플레이 진공실장기술
권상직,유인상,Kwon, Sang Jik,Yoo, In Sang 한국전기전자재료학회 2016 전기전자재료학회논문지 Vol.29 No.3
One of the important issues for fabricating the microelectronic display devices such as FED, PDP, and VFD is to obtain a high vacuum level inside the panel. In addition, sustaining the initial high vacuum level permanently is also very important. In the conventional packing technology using a tabulation method, it is not possible to obtain a satisfiable vacuum level for a proper operation. In case of FED, the poor vacuum level results in the increase of operating voltage for electron emission from field emitter tips and an arcing problem, resultantly shortening a life time. Furthermore, the reduction of a sealing process time in the PDP production is very important in respect of commercial product. The most probable method for obtaining the initial high vacuum level inside the space with such a miniature and complex geometry is a vacuum in-line sealing which seals two glass plates within a high vacuum chamber. The critical solution for the vacuum sealing is to develop a frit glass to avoid the bubbling or crack problems during the sealing process at high temperature of about $400^{\circ}C$ under the vacuum environment. In this study, the suitable frit power was developed using a mixture of vitreous and crystalline type frit powders, and a vacuum sealed CNT FED with 2 inch diagonal size was fabricated and successfully operated.
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아르곤 이온에 의해 표면처리된 CNT 에미터의 전계방출 특성
권상직 대한전자공학회 2007 電子工學會論文誌 IE (Industry electronics) Vol.44 No.2
A surface treatment was performed after the screen printing of a carbon nanotube paste for obtaining the carbon nanotube field emission array(CNT FEA) on the soda-lime glass substrate. In this experiment, Ar ion bombardment was applied as an effective surface treatment method. After making a cathode electrode on the glass substrate, photo sensitive CNT paste was screen-printed, and then back-side was exposure by uv light. Then, the exposed CNT paste was selectively remained by development. After post-baking, the remained CNT paste was bombarded by accelerated Ar ions for removing some binders and exposing only CNTs. As results, the field emission characteristics were strongly depended on the accelerating energy. At 100 eV, the emission was highest and as the acceleration energy increases more then 100 eV, the emission decreased. This was due to the removal of CNT itself as well as binders. 카본나노튜브 전계 방출 어레이(carbon nanotube field emission array, CNT FEA)를 유리기판 상에 형성시키기 위하여 CNT 페이스트를 스크린 프린팅 후 표면처리를 수행하였다. 본 실험에서는 효과적인 표면처리 방법으로서 이온 빔을 조사(expose)시키는 방법을 연구하였다. 먼저, 유리 기판상에 감광성 CNT 페이스트를 스크린 프린팅하고 UV 후면노광 및 현상공정에 의해 선택적으로 CNT 페이스트를 남겼다. 다시 고온에서 소성후 CNT들은 바인더 성분들에 의해 문히게 된다. 본 실험에서는 소성된 CNT 페이스트의 표면상에 Ar 이온빔을 가속시켜 페이스트의 바인더(binder)를 선택적으로 제거함으로써 전계방출 특성을 향상시킬 수 있었다. 표면처리를 위한 이온 빔 가속시 이온빔의 가속에너지에 따라 특성이 크게 변화되었는데, 본 연구에서는 100 V의 낮은 가속 전압에서 가장 높은 전계방출 특성을 나타내었으며 가속 전압이 너무 높으면 바인더 성분 외에도 CNT 자체가 제거됨으로써 오히려 특정이 저하됨을 알 수 있었다.
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