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강득수(Deuksoo Kang),김종원(Jongwon Kim) 한국정밀공학회 2004 한국정밀공학회 학술발표대회 논문집 Vol.2004 No.10월
This paper describes the mechanism of parallel micro machine platform and its feedback control system for acquiring high accuracy. The parallel micro machine platform that has developed has 5x5x5 work-space and sub-micron accuracy. For the high accuracy, the feedback control system is important but errors in machining and assembling are inevitable. Kinematic calibration is important for this reason. In this paper, various error components are introduced and the effects of error component are analyzed.
높은 회전성능(100°)을 가지는 초정밀 위치결정용 마이크로 병렬기구 플랫폼의 개발
윤용하(Yongha Yoon),강득수(Deuksoo Kang),서태원(Taewon Seo),김홍석(Hongseok Kim),성태종(Taijong Sung),김종원(Jongwon Kim) 한국정밀공학회 2006 한국정밀공학회 학술발표대회 논문집 Vol.2006 No.5월
This paper presents a micro-positioning platform based on the unique parallel mechanism recently developed by the authors. The platform has a meso-scale rectangular shape whose size is 20 × 23 ㎜. The stroke is 5 ㎜ for both the x- and yaxis and 100 degrees for the α-axis(the rotational axis along the x-axis). The platform is actuated by the three sets of twostage linear actuators: a linear motor for rough positioning and a piezo actuator for fine positioning. The platform is already assembled. Experimental results of the positioning measurements and control performance are presented.