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Display 응용을 위한 Nano Template 공정 최적화 및 CNT 성장연구
강교성(Gyo-Sung Kang),권순일(Soon-Il Kwon),김홍오(Hong-O Kim),임동건(Dong-Gun Lim),양계준(Kea-Joon Yang) 대한전자공학회 2007 대한전자공학회 학술대회 Vol.2007 No.7
In this paper, established process of AAO template produce and analysed and observed being growth CNT(Carbon nanotube) after processing of CVD with FE-SEM and Raman spectrum. AAO template analysed four kinds of substrate about Al/Si, Al/SiO₂/Si, Al/Ni/Ti/Si, Al sheet, and then make CNT grow using CVD. The Size of manufactured pore adjusted approximately from 30 ㎚ to 70 ㎚ and length adjusted from 300 ㎚ to 1 ㎛. Diameter of CNT was 40 ㎚ and length grow about 1 ㎛.
ICP-RIE 방법에 의한 Si 식각 특성 개선에 관한 연구
강교성(Gyo-Sung Kang),권순일(Soon-Il Kwon),양계준(Kea-Joon Yang),김홍오(Hong-O Kim),임동건(Dong-Gun Lim) 대한전자공학회 2007 대한전자공학회 학술대회 Vol.2007 No.7
In this paper, deep trench etching of silicon was investigated as a function of source power (300~600 W), DC bias voltage (0~-100 V), O2 addition (0~29%). As increasing the RF source power from 300 W to 700 W, the etch rate was increased from 3.52 ㎛/min to 7.07 ㎛/min. The addition of O₂ gas improved the etch rate and the selectivity. The highest etch rate is achieved at the O₂ gas addition of 12%. The selectivity to PR was 65.75 with O₂ gas addition of 24%. At DC bias voltage of -40 V and C₄F? gas flow rate of 30 seem, We were able to achieve etch rate as high as 5.25 ㎛/min with good etch profile.
강교성(Kang, Kyo Sung),김경순(Kim, Kyoung Soon) 대한건축학회 2022 대한건축학회 학술발표대회 논문집 Vol.42 No.1
Over the years, the technological improvement of apartment construction has developed in the construction period or the CM field, but changes in basic structural aspects have not deviated significantly from the unified wall structure due to economic and various reasons since the emergence of apartments. In addition, rather than applying the user"s intention or freedom within the plans or space composition, more of rational factors has been maintained in accordance with the building code of each time period. This study aims to propose a structure and plan for apartment houses that can further reflect the free will of users within the framework of the current building code and economic aspects while breaking away from the uniform aspects of the current apartment structure and floor plan.
박경수,최영진,박재관,강교성,임동건,박재환,Park, Kyung-Su,Choi, Young-Jin,Park, Jae-Gwan,Kang, Gyo-Sung,Lim, Dong-Gun,Park, Jae-Hwan 한국재료학회 2007 한국재료학회지 Vol.17 No.9
The effect of oxygen in the synthesis of oxide nanowires by using carbothermal reduction process have been studied thermodynamically and kinetically. By using laboratory air, ZnO nanowires could be fabricated in the carbothermal reduction process and a metal oxidation process. As the processing pressure decreases, the diameter of the nanowires decreases and the oxygen vacancy increases. As the processing pressure increases, the oxygen vacancy decreases and the shape of the ZnO becomes plate-like.