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崔振鎬(Jinho Choi),安商丁(Sang Jung Ahn),朴丙天(Byong Chon Park),柳?(Joon Lyou) 대한전기학회 2008 전기학회논문지 Vol.57 No.10
Nano manipulator is used to manufacture Carbon Nano'Tube (CNT) tips. Using nano manipulator, operator attaches a CNT at the apex of Atomic Force Microscope(AFM) tip, which requires a mastery of mechanics and long manufacture time. Nano manipulator is installed inside a Scanning Electron Microscope (SEM) chamber to observe the operation. This paper presents a control scheme for horizontal axes of nano manipulator via processing SEM image. Edges of AFM tip and CNT are first detected, and the position information so obtained is fed to control horizontal axes of nano manipulator. That is, a visual servoing loop is realized to control the axes more precisely in nano scale.