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준탄성광산란을 이용한 0.3㎛ 폴리스티렌구의 평균지름 측정 불확도 향상
박병천(Byong Chon Park),정명세(Myung Sai Chung) 한국광학회 1998 한국광학회지 Vol.9 No.4
준탄성광산란(QELS)을 이용하여 지름이 0.3㎛인 폴리스티렌구의 평균지름을 측정하였다. 폴리스티렌구가 표준입자로 사용되기 위하여는 평균지름의 불확도가 수 % 이내가 되어야 한다. 본 연구에서는 QELS장치중 시료용기의 정렬방법 및 온도측정방법을 특별히 보완하여 계통오차를 대폭 줄였다. 표준입자 인증물질인 NIST SRM 1691 (0.269±0.007㎛: TEM; 0.275±0.007㎛: QELS)을 측정하여 평균지름이 0.273±0.006㎛인 결과를 얻었다. 개선된 측정방법 및 측정불확도를 상세히 기술하였으며 NIST의 측정결과와 비교하였다. Quasi-elastic light scattering is utilized to measure the mean diameter of the 0.3㎛-diameter polystyrene sphere. The mean diameter of the polystyrene sphere is required to be known within the uncertainty of a few per centages. The systematic error has been considerably reduced by improving the system for the angle alignment and temperture measurement of cell. NIST SRM 1691 (0.269±0.007㎛ TEM; 0.275±0.007㎛: QELS) is measured to be 0.273㎛±0.006㎛ in mean diameter. Detailed description is given of the improved method and the resultant uncertainty, and the comparison of results with NIST is followed.
CCD 카메라가 장착된 광학현미경을 사용한 폴리스티렌구 (3 ㎛와 10 ㎛)의 평균지름측정
정기영(Ki Young Jung),박병천(Byong Chon Park),강주식(Ju Sik Kang),송원영(Won Young Song),오범환(Beom-hoan O) 한국광학회 1998 한국광학회지 Vol.9 No.6
중심거리측정법은 서로 붙어있는 두 입자 중심점간의 거리를 측정하여 입자의 지름을 구하는 방법이다. 표면장력에 의해 배열이 형성된 시편 입자들의 초점군을 투과식 광학현미경에 평행 레이저광을 입사시켜 얻어내고 CCD 카메라로 영상을 받아 전산 분석하였다. Global lab image라는 영상처리 프로그램으로 초점들의 중심점을 찾고 붙어있는 입자들의 중심점간 거리를 화소(CCD 카메라의 pixel) 단위로 계산하였으며, 화소의 좌표는 레이저 간섭계로 변위를 읽는 이송대를 이용하여 교정하였다. 기존의 측정방법을 개선하여 빠른 시간에 간편하게 측정하면서도 표준입자의 배율교정에 충분한 불확도를 얻을 수 있었다. 본 실험에는 NIST 인증물질인 3 ㎛와 10 ㎛ 폴리스티렌구(NIST SRM 1962, 1960)를 측정하였으며, 1%이하의 불확도(신뢰도 99% 수준)로써 NIST 결과와 비교하였다. Center Distance Finding (CDF) is a technique to find the sphere diameter by measuring the distance between two contacting spheres. The focal spots of the sphere clusters are formed in the back-focal plane by the transmission-mode optical microscope with the pseudothermal illumination source. Digital images taken by the CCD camera were processed by the software called Global Lab Image. The centers of the focal spots are found and the spot positions are expressed in terms of the CCD pixel elements, whose coordinates are calibrated by a heterodyne interferometer. The new CDF measurement system has been developed, which are more advantageous in time and convenience than the existing system, while the measurement uncertainty remains sufficient for its use as a magnification standard for optical microscopy. Two kinds of polystyrene spheres whose nominal diameters 3 and 10 ㎛ (NIST SRM 1962 and 1960) are measured with the uncertainty less than 1% at the confidence level of 99%, and the results are compared with the results of National Institute of Standards and Technology.
나노조작기의 수평축 위치제어를 위한 Visual Servoing Loop 구성
최진호(Jinho Choi),박병천(Byong Chon Park),안상정(Sang Jung Ahn),김달현(Dal-Hyun Kim),유준(Joon Lyou) 대한전기학회 2007 대한전기학회 학술대회 논문집 Vol.2007 No.10
Nano manipulator is used to manufacture Carbon NanoTube(CNT) tips. Using nano manipulator. operator attaches a CNT at the end of Atomic Force Microscopy(AFM) tip, which requires a master mechanic and long manufacture time. Nano manipulator is installed inside Scanning Electron Microscopy (SEM) chamber to observe the operation. This paper presents a control of horizontal axis of nano manipulator via processing SEM image. Edges of AFM tip and CNT are first detected, the position information so obtained is fed to control horizontal axis of nano manipulator. To be specific, visual servoing loop was realized to control the axis more precisely.
나노조작기 및 집속이온빔을 이용한 정밀 나노튜브 탐침의 제작
정기영(Jung Ki Young),박병천(Park Byong Chon),안상정(Ahn Sang Jung),최진호(Choi Jinho) 대한기계학회 2005 대한기계학회 춘추학술대회 Vol.2005 No.11
Precision carbon nanotube tip for atomic force microscope was fabricated where carbon nanotube orientation is controlled within the precision of 1 degree. The orientation, diameter and length of carbon nanotube tip are crucial factors for faithful profiling of surface patterns. With a nano-manipulation while viewing scanning electron microscope live image followed by focused ion beam process, precision carbon nanotube tip could be made. Precision carbon nanotube tip acts as a normal nanotube tip without Focused ion beam process. Further it maintains the elasticity. Precision tip can, in principle, enter the trench or hole less than 70 ㎚, which is impossible with the current state of the art silicon tip for critical dimension atomic force microscope.
崔振鎬(Jinho Choi),安商丁(Sang Jung Ahn),朴丙天(Byong Chon Park),柳?(Joon Lyou) 대한전기학회 2008 전기학회논문지 Vol.57 No.10
Nano manipulator is used to manufacture Carbon Nano'Tube (CNT) tips. Using nano manipulator, operator attaches a CNT at the apex of Atomic Force Microscope(AFM) tip, which requires a mastery of mechanics and long manufacture time. Nano manipulator is installed inside a Scanning Electron Microscope (SEM) chamber to observe the operation. This paper presents a control scheme for horizontal axes of nano manipulator via processing SEM image. Edges of AFM tip and CNT are first detected, and the position information so obtained is fed to control horizontal axes of nano manipulator. That is, a visual servoing loop is realized to control the axes more precisely in nano scale.