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LaNiO<sub>3</sub> 전극위에 (100)으로 배향된 (Na<sub>0.5</sub>Bi<sub>0.5</sub>)TiO<sub>3</sub> 박막의 성장
유영배,박민석,손세모,정수태,Yoo Young-Bae,Park Min-Seok,Son Se-mo,Chung Su-Tae 한국전기전자재료학회 2006 전기전자재료학회논문지 Vol.19 No.2
[ $(Na_{0.5}Bi_{0.5})TiO_3$ ][NBT] thin films were prepared on a highly (100) oriented $LaNiO_3[LNO]$ by sol-gel process. X-ray diffraction patterns of the NBT films annealed above $600^{\circ}C$ for 5 minutes have confirmed a highly (100) oriented growth and pseudocubic structure (a=3.884${\AA}$). The (l00) orientation factor increased from 90 to $99\%$ with increasing soaking time from 5 to 60 minutes at $600^{\circ}C$. The NBT films ($600^{\circ}C$/5 min,) have a flat and dense microstructure with large columnar grains, and their grain size are about 44 nm. The Au/NBT/LNO/Si hetero structure sample show a ferroelectric properties.