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Cathodoluminescence spectroscopic study of the boron-nitrogen co-doping diamond films
Yuko Hatanaka,Sadao Takeuchi,Koji Iwasaki,Hidenori Gamo,Kiyoharu Nakagawa,Toshihiro Ando,Mikka Nishitani-Gamo 제어로봇시스템학회 2008 제어로봇시스템학회 국제학술대회 논문집 Vol.2008 No.10
Co-doping diamond is of scientific and technologically interest because a new electrical and/or optical property is expected to obtain. In this study, we have carried out a simultaneous addition of diborane and nitrogen in the gas phase for the growth of co-doping diamonds by microwave plasma-assisted chemical vapor deposition (MPCVD) method. We measured the cathodoluminescence (CL) spectra of the co-doping diamond films. To investigate the effect of boron-nitrogen co-doping addition on the CL spectra, we compared the CL spectra of boron-nitrogen co-doping diamonds with those of nitrogen-doped diamonds. The results revealed that the addition of boron suppressed the nitrogen incorporation into the CVD diamonds.