http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
Hyo-Jin Nam,SeongSoo Jang,Young-Sik Kim,Caroline Sunyong Lee,Won-Hyeog Jin,Il-Joo Cho,Jong-Uk Bu 대한전자공학회 2005 Journal of semiconductor technology and science Vol.5 No.1
Silicon nitride cantilevers integrated with silicon heaters and piezoelectric sensors were developed for the scanning probe microscope (SPM) based data storage application. These nitride cantilevers are expected to have better mechanical stability and uniformity of initial bending than the previously developed silicon cantilevers. Data bits of 40 nm in diameter were recorded on PMMA film and the sensitivity of the piezoelectric sensor was 0.615 fC/nm, meaning that indentations less than 20 nm in depth can be detected. For high speed operation, 128×128 cantilever array was developed.
Thermo-Piezoelectric Read/Write Mechanisms for Probe-Based Data Storage
Nam, Hyo-Jin,Kim, Young-Sik,Lee, Sun-Yong,Jin, Won-Hyeog,Jang, Seong-Soo,Cho, Il-Joo,Bu, Jong-Uk The Society of Information Storage Systems 2007 정보저장시스템학회논문집 Vol.3 No.1
In this paper, a thermo-piezoelectric mechanism with integrated heaters and piezoelectric sensors has been studied for low power probe-based data storage. Silicon nitride cantilever integrated with silicon heater and piezoelectric sensor has been developed to improve the uniformity of cantilevers. Data bits of 40 nm in diameter were recorded on PMMA film. The sensitivity of the piezoelectric sensor was 0.615 fC/nm after poling the PZT layer. And, the $34\times34$ probe array integrated with CMOS circuits has been successfully developed by simple one-step bonding process. The process can simplify the process step and reduce tip wear using silicon nitride tip.