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송성근(Seong Geun Song),전인수(In Su Jeon),Nyuenthan Hai 대한기계학회 2010 대한기계학회 춘추학술대회 Vol.2010 No.11
To develop the X-ray microscope for the non-destructive inspection, It is nessessary that the mirror can form the high intensity single-wave parallel X-ray beam. For fabrication of X-ray mirror, it is firstly designed for wavelength of X-ray source. and then, to use the designed curvature, We make the core and deposit the multilayer on the core to form the parallel X-ray. In this study, the mirror deposited by W/Al multilayers was fabricated to use for parallel X-ray mirror. and deposit condition and degree of precision of surface of each layer was measured by SEM and AFM.