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A review of vibration-based MEMS hybrid energy harvesters
Mohammed Salim,Hakim S. Sultan Aljibori,Dhia Salim,M. Haris M. Khir,A. Sh. Kherbeet 대한기계학회 2015 JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY Vol.29 No.11
Energy harvesters based on Micro-electromechanical systems (MEMS) are well known nowadays due to their small features, abilityfor monolithic integration with the integrated circuit in a single platform, robust, and easily fabricated in bulk. The piezoelectric (PZT)and the electromagnetic (EM) generators are examples of such energy harvesters. To further increase their effectiveness in harvestingambient energy, researchers started to venture into hybrid energy harvesters. Few literature reviews may be found on MEMS harvestingdevices, but not on hybrid harvesters in specific. This paper intended to further elaborate on the hybrid energy harvesters, reported Literatureon such harvesters for recent years with different architectures, models, and results are presented. Table of power comparison betweenthe reported harvesters is presented and discussed.