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Fabrication and evaluation of SU-8 based wireless pressure sensor
Gang-Hyeon Sun(선강현),Dong-Su Kim(김동수),Dong-weon Lee(이동원) 대한기계학회 2021 대한기계학회 춘추학술대회 Vol.2021 No.6
In the recent years, the development of wireless sensors has attracted attention, with the development of MEMS(Micro-Electro-Mechanical-System) technology. The pressure sensor, one of the wireless sensor, is a device that measures the applied force, pressure, by a liquid or gas on a surface and translates it to the electrical signal. We fabricate this sensor based on capacitive type which measures change in capacitance with two metal plates. One of the two capacitor plates acts as the diaphragm that is displaced by the pressure, changing the capacitance of the circuit. Variation of signal detected by network analyzer evaluates the resonance frequency and phase shift with different interrogate distance and pressure force. [그림 본문 참조]