http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
Mobility Enhancement by Back-Gate Biasing in Ultrathin SOI MOSFETs With Thin BOX
Ohata, A.,Bae, Y.,Fenouillet-Beranger, C.,Cristoloveanu, S. IEEE 2012 IEEE electron device letters Vol.33 No.3
<P>Carrier mobility <TEX>$(\mu)$</TEX> at various back-gate biases is studied for n- and p-channel ultrathin (8 nm) SOI MOSFETs with thin (10 nm) buried oxide (BOX) and ground plane (GP). We found that <TEX>$\mu$</TEX> did not deteriorate for either thin BOX or GP structure, even in the back channel (BC). We also found the largest <TEX>$\mu$ </TEX> enhancement effect in p-channel devices by the back-gate bias. As this enhancement effect could conceal the superior <TEX>$\mu$</TEX> at the <TEX>$\hbox{Si/SiO}_{2}$</TEX> interface, <TEX>$\mu$</TEX> was maximized when both the front channel and BC were conducting. By contrast, <TEX>$\mu$ </TEX> in n-channel devices was maximized only when the BC was activated. This large <TEX>$\mu$</TEX> gain in p-channel devices is promising for further CMOS scaling.</P>