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Wide-Band Measurements of Antenna-Coupled Microbolometers for ㎔ Imaging
Aleksi Tamminen,Juha Ala-Laurinaho,Juha Mallat,Arttu Luukanen,Erich N. Grossman,Antti V. Raisanen 한국전자파학회JEES 2010 Journal of Electromagnetic Engineering and Science Vol.10 No.3
We present results of room-temperature characterization of lithographically manufactured antenna-coupled NbN microbolometers. The bolometers are assembled together with a hyper-hemispherical Si lens to couple the incident radiation to the bolometer from the back-side of the substrate. The bolometers are designed to operate at 300~1,000 ㎓ and they are characterized at 321~782 ㎓. Radiation patterns are measured at 321 ㎓, 400 ㎓, 654 ㎓, and at 782 ㎓. The frequency dependency of the beamwidth is studied with several azimuthal beam profile measurements at 321~500 ㎓.