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뜬 마이크로 디바이스를 이용한 Ge-Si<SUB>x</SUB>Ge<SUB>1-x</SUB> Core-Shell Nanowires의 열전도율 측정
박현준(Hyun Joon Park),David Dillen,나정효(Jung Hyo Nah),Emanuel Tutuc,설재훈(Jae Hun Seol) 대한기계학회 2015 대한기계학회 춘추학술대회 Vol.2015 No.11
Several theoretical studies suggested that the thermal conductivity in core-shell nanowires would be decreased. To experimentally verify that phenomenon, the thermal conductivity of Ge–SixGe1-x core-shell nanowires was measured using suspended microdevices. The core-shell structure of the nanowires was synthesized using the chemical vapor deposition (CVD) and subsequent vapor-liquid-solid (VLS) methods. Based on material characterization with transmission electron microscopy (TEM) and energy dispersive X-ray spectroscopy (EDS), the crystallinity of the Ge cores and the SixGe1-x shells was clearly confirmed and the silicon composition (x) in the shells is 0.65. The measured thermal conductivity values are in the range of 9–13 W/mK at room temperature and are lower by at most ~30 percent than that of a germanium nanowire with a comparable diameter.