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- 저자 : Berggren Karl K. (검색결과 2 건)
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A Path to Ultranarrow Patterns Using Self-Assembled Lithography
Jung, Yeon Sik,Chang, J. B.,Verploegen, Eric,Berggren, Karl K.,Ross, C. A. American Chemical Society 2010 Nano letters Vol.10 No.3
<P>The templated self-assembly of block copolymer (BCP) thin films can generate regular arrays of 10−50 nm scale features with good positional and orientational accuracy, but the ordering, registration and pattern transfer of sub-10-nm feature sizes is not well established. Here, we report solvent-annealing and templating methods that enable the formation of highly ordered grating patterns with a line width of 8 nm and period 17 nm from a self-assembled poly(styrene-<I>b</I>-dimethylsiloxane) (PS-PDMS) diblock copolymer. The BCP patterns can be registered hierarchically on a larger-period BCP pattern, which can potentially diversify the available pattern geometries and enables precise pattern registration at small feature sizes. Sub-10-nm-wide tungsten nanowires with excellent order and uniformity were fabricated from the self-assembled patterns using a reactive ion etching process.</P><P><B>Graphic Abstract</B> <IMG SRC='http://pubs.acs.org/appl/literatum/publisher/achs/journals/content/nalefd/2010/nalefd.2010.10.issue-3/nl904141r/production/images/medium/nl-2009-04141r_0001.gif'></P><P><A href='http://pubs.acs.org/doi/suppl/10.1021/nl904141r'>ACS Electronic Supporting Info</A></P>
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Directed self-assembly of a two-state block copolymer system
Do Hyung Wan,Choi Hong Kyoon,Gadelrab Karim R.,Chang Jae-Byum,Alexander-Katz Alfredo,Ross Caroline A.,Berggren Karl K. 나노기술연구협의회 2018 Nano Convergence Vol.5 No.25
In this work, ladder-shaped block copolymer structures consisting of parallel bars, bends, and T-junctions are formed inside square confinement. We define binary states by the two degenerate alignment orientations, and study properties of the two-state system. We control the binary states by creating openings around the confinement, changing the confinement geometry, or placing lithographic guiding patterns inside the confinement. Self-consistent field theory simulations show templating effect from the wall openings and reproduce the experimental results. We demonstrate scaling of a single binary state into a larger binary state array with individual binary state control.
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