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Pretreatment Effects on the Lengths and Diameters of Carbon Nanotubes
이충훈,Dao Quang Duy,김현석,윤당모,김재훈,하정웅,이강재,황용규,Bach Thanh Cong 한국물리학회 2008 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.53 No.5
We have investigated the pretreatment effects on the lengths and the diameters of carbon nanotubes (CNTs) grown on a Ni catalyst by using dc plasma-enhanced chemical-vapor deposition system. The average sizes of the Ni particles changed with the cathode bias during the pretreatment, with the minimum value at a cathode voltage -100 V. The diameters of the CNTs followed the size of the Ni particles. In the cathode voltage range from -100 V to -600 V, the average diameter of the CNTs changed from 31.7 nm to 66.5 nm with increasing Ni sizes. The plasma power and the pretreatment time should be optimized to control the diameters of vertically-aligned CNTs. Also, N2 is added in NH3 during the pretreatment, the lengths and the densities of the CNTs can be controlled.
Role of Atomic and Molecular Nitrogen in Carbon Nanotube Formation
Dao Quang Duy,김현석,Dang Mo Yoon,Jung Woong Ha,Kang Jea Lee,황용규,Bach Thanh Cong,이충훈 한국물리학회 2009 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.54 No.4
We have investigated the pretreatment effects of nitrogen on the length and the alignment of carbon nanotubes (CNTs) grown on a Ni catalyst by using dc-plasma enhanced chemical vapor deposition system. The surface of the Ni catalyst was pretreated with a mixture of NH3 and N2, instead of pure NH3 and the length of the CNTs has changed from 1.6 um to 400 nm as the NH3/N2 flow rate ratio was decreased. We showed that the length and the alignment of the CNTs could be controlled by changing the NH3/N2 flow rate ratio. The fabricated CNTs were further evaluated by using their Raman spectra. The nitrogen concentration on the surface of the Ni catalyst after the pre-treatment was analyzed by using X-ray photoelectron spectroscopy and the physical structure of CNTs was analyzed using scanning electron microscopy and high resolution transmission electron microscope. We suggest that the N2 adsorption on the surface of Ni changes the carbon atom diffusion during the CNT growth and that the physical structures of CNTs are drastically changed We have investigated the pretreatment effects of nitrogen on the length and the alignment of carbon nanotubes (CNTs) grown on a Ni catalyst by using dc-plasma enhanced chemical vapor deposition system. The surface of the Ni catalyst was pretreated with a mixture of NH3 and N2, instead of pure NH3 and the length of the CNTs has changed from 1.6 um to 400 nm as the NH3/N2 flow rate ratio was decreased. We showed that the length and the alignment of the CNTs could be controlled by changing the NH3/N2 flow rate ratio. The fabricated CNTs were further evaluated by using their Raman spectra. The nitrogen concentration on the surface of the Ni catalyst after the pre-treatment was analyzed by using X-ray photoelectron spectroscopy and the physical structure of CNTs was analyzed using scanning electron microscopy and high resolution transmission electron microscope. We suggest that the N2 adsorption on the surface of Ni changes the carbon atom diffusion during the CNT growth and that the physical structures of CNTs are drastically changed
Controlling the Shape of a Carbon Nanotube by Using the Reaction Chamber Pressure
D. Q. Duy,김현석,Dang Mo Yoon,Jung Woong Ha,Kang Jea Lee,황용규,Bach Thanh Cong,이충훈 한국물리학회 2009 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.55 No.1
We report the effects of the reaction chamber pressure on the shape and the structure of verticallyaligned carbon nanotubes (CNT) grown on a Ni catalyst by using dc plasmaenhanced chemical vapor deposition system. By controlling the pressure of the reaction chamber We were able to alter the shape and the crytallinity of CNTs. With increasing the chamber pressure, the length was rapidly reduced from 4.5 μm to 800 nm, but the crytallinity was strongly enhanced. As the reaction chamber pressure decreases, the tips of the CNTs were observed to change from a hemispherical tip with one conical Ni particle to a distorted the tip with more than one tiny Ni particle which means that the formation of Ni conglomerates does not only occur during the pretreatment process but also continues during the CNT growth process. These results have further clarified the role of the reactive etching ions in the growth of CNTs. We report the effects of the reaction chamber pressure on the shape and the structure of verticallyaligned carbon nanotubes (CNT) grown on a Ni catalyst by using dc plasmaenhanced chemical vapor deposition system. By controlling the pressure of the reaction chamber We were able to alter the shape and the crytallinity of CNTs. With increasing the chamber pressure, the length was rapidly reduced from 4.5 μm to 800 nm, but the crytallinity was strongly enhanced. As the reaction chamber pressure decreases, the tips of the CNTs were observed to change from a hemispherical tip with one conical Ni particle to a distorted the tip with more than one tiny Ni particle which means that the formation of Ni conglomerates does not only occur during the pretreatment process but also continues during the CNT growth process. These results have further clarified the role of the reactive etching ions in the growth of CNTs.