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A Review of Epitaxial Metal-Nitride Films by Polymer-Assisted Deposition
Luo, Hongmei,Wang, Haiyan,Zou, Guifu,Bauer, Eve,Mccleskey, Thomas M.,Burrell, Anthony K.,Jia, Quanxi The Korean Institute of Electrical and Electronic 2010 Transactions on Electrical and Electronic Material Vol.11 No.2
Polymer-assisted deposition is a chemical solution route to high quality thin films. In this process, the polymer controls the viscosity and binds metal ions, resulting in a homogeneous distribution of metal precursors in the solution and the formation of crack-free and uniform films after thermal treatment. We review our recent effort to epitaxially grow metal-nitride thin films, such as hexagonal GaN, cubic TiN, AlN, NbN, and VN, mixed-nitride $Ti_{1-x}Al_xN$, ternary nitrides tetragonal $SrTiN_2$, $BaZrN_2$, and $BaHfN_2$, hexagonal $FeMoN_2$, and nanocomposite TiN-$BaZrN_2$.
A Review of Epitaxial Metal-Nitride Films by Polymer-Assisted Deposition
Hongmei Luo,Haiyan Wang,Guifu Zou,Eve Bauer,Thomas M. McCleskey,Anthony K. Burrell,Quanxi Jia 한국전기전자재료학회 2010 Transactions on Electrical and Electronic Material Vol.11 No.2
Polymer-assisted deposition is a chemical solution route to high quality thin films. In this process, the polymer controls the viscosity and binds metal ions, resulting in a homogeneous distribution of metal precursors in the solution and the formation of crack-free and uniform films after thermal treatment. We review our recent effort to epitaxially grow metal-nitride thin films, such as hexagonal GaN, cubic TiN, AlN, NbN, and VN, mixed-nitride Ti1-xAlxN, ternary nitrides tetragonal SrTiN2, BaZrN2, and BaHfN2, hexagonal FeMoN2, and nanocomposite TiN-BaZrN2.