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A Review of Outgassing and Methods for its Reduction
Rebecca Grinham,Andrew Chew 한국진공학회 2017 Applied Science and Convergence Technology Vol.26 No.5
There are several contributions to the gas load of a system of which often the most important is outgassing. Adsorption occurs via two main processes, physisorption and chemisorption, and can be described using five (or six) classifying isotherms. Outgassing is the result of desorption of previously adsorbed molecules, bulk diffusion, permeation and vapourisation. Looking at the desorption rate, pumping speed and readsorption on surfaces, the net outgassing of the system can be calculated. There is significant variation in measured outgassing rates between different materials but also between published rates for the same materials, in part due to the number of different methods used to measure outgassing. This article aims to review the outgassing process, outgassing rates, measurement methods and techniques that can be used to reduce the outgassing of a system.
A Review of Outgassing and Methods for its Reduction
Grinham, Rebecca,Chew, Dr Andrew The Korean Vacuum Society 2017 Applied Science and Convergence Technology Vol.26 No.5
There are several contributions to the gas load of a system of which often the most important is outgassing. Adsorption occurs via two main processes, physisorption and chemisorption, and can be described using five (or six) classifying isotherms. Outgassing is the result of desorption of previously adsorbed molecules, bulk diffusion, permeation and vapourisation. Looking at the desorption rate, pumping speed and readsorption on surfaces, the net outgassing of the system can be calculated. There is significant variation in measured outgassing rates between different materials but also between published rates for the same materials, in part due to the number of different methods used to measure outgassing. This article aims to review the outgassing process, outgassing rates, measurement methods and techniques that can be used to reduce the outgassing of a system.