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Preparation of BaTiO₃ Thin Films using Pulsed KrF Laser Deposition and in situ Laser Annealing
Akihiko Machida,Atsushi Ito,Minoru Obara 慶熙大學校 레이저 工學硏究所 1996 레이저공학 Vol.7 No.-
Barium titanate (BaTiO³) thin films have been fabricated on MgO substrate using a hybrid process of pulsed KrF laser deposition (PLD) and in situ laser annealing. By utilizing in situ excimer laser annealing, epitaxial films of 1 ㎛ thickness were successfully fabricated and its refractive index was close to that of the bulk crystal. Substrate temperature to fabricate epitaxial films was relatively low at 650℃, and smooth surface films were achieved with this method.