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김지영(Ji-Young Kim),Abdul Rheman,심기동(Gi-Dong Sim) 대한기계학회 2021 대한기계학회 춘추학술대회 Vol.2021 No.11
Nickel-titanium (NiTi) alloy thin films are attractive for micro-scale applications because of its fast response on temperature by high surface area, large work output, and higher strain recovery. In terms of superelasticity, Ni-rich NiTi alloys is primarily used due to enhanced phase transformation stability. As it is well known that the mechanical behavior of materials is scale dependent, it is crucial to understand size-effect on the mechanical behavior of NiTi for reliable operation in micro-scale devices. Therefore, in this study, mechanical behavior of Ni-rich NiTi thin films was characterized to identify the effect of the Ni concentration on superelasticity. Free-standing Ni-rich NiTi thin films were fabricated by sputter deposition followed by micro-electro-mechanicalsystem (MEMS) process. Tensile tests were conducted using a custom-built micro tensile tester. Films with higher Ni concentration showed improved strength with enhanced phase transformation stability.
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