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진공증착법에 의한 Bismuth Telluride 박막의 제작 및 물성
황삼규 ( Samgyu Hwang ),홍기민 ( Kimin Hong ) 충남대학교 기초과학연구원 2021 충남과학연구지 Vol.38 No.1
Bismuth Telluride(BiTe) is a material which is widely used in thermoelectric devices in the room temperature range because of its high conversion efficiency. We fabricated Bismuth Telluride thin films by using a thermal evaporation method and measured electrical resistivity of them from 80 K to 500 K. We also observed the effects of high temperature annealing of the films on the changes in electrical resistivity. By using X-ray diffraction and scanning electron microscopy-energy dispersive spectrometer, we investigated the crystallinity and composition of the BiTe thin films.