http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
내부식 하전 및 집진방식의 전기집진장치 개발 및 미세입자 집진성능 평가
김학준(Hak-Joon Kim),한방우(Bangwoo Han),홍원석(Won-Suk Hong),신완호(Wan-Ho Shin),오원석(Won-suk Oh),황규동(Kyu-dong Hwang),김용진(Yong-Jin Kim),윤종필(Jong-pil Yoon),한경수(Kyung-soo Han) 대한기계학회 2009 대한기계학회 춘추학술대회 Vol.2009 No.11
Current electrostatic precipitators (ESPs) for removing fine particles from semiconductor industries have used costly anti-corrosive metallic materials to maintain the particle removal performance. Due to the economical demand of the industries, a novel ESP was developed whose charger was made of carbon fibers and collection plates of PET films in which an aluminum sheet was inserted. The ESP was evaluated by changing applied voltages to chargers and collection plates, flow rates and number of charging channels etc. KCl particles whose mean diameter was 0.1 ㎛ and concentration was 10?~10? #/㎥ were used as test particles and a scanning mobility particle sizer was used to measure changes in particle number concentrations before and after the ESP. The experimental results showed that more than 90 % of particles were removed by the ESP with 9 channels and 65 ㎜ collection plates at 500 CMH when 7 ㎸ and 10 ㎸ were applied to discharge electrodes and collection plates, respectively.
고내구성 하전 및 집진 방식 전기집진기의 미세입자 제거 특성
김학준(Hak-joon Kim),한방우(Bangwoo Han),홍원석(Won-seok Hong),신완호(Wan-ho Shin),송동근(Dong-keun Song),정상현(Sang-hyeon Jung),김용진(Yong-jin Kim),오원석(Won-suk Oh),황규동(Kyu-dong Hwang),유성연(Seong-yeon Yoo) 대한기계학회 2010 大韓機械學會論文集B Vol.34 No.4
반도체 공정에서 배출되는 미세입자를 포집하기 위하여 전기집진장치가 적용되고 있으나, 배출가스 내 포함된 강부식성 오염원에 의한 전기집진장치 내부 오염 및 부식 문제가 심각하여, 이를 해결하기 위한 방안이 절실하다. 본 연구에서는 탄소섬유로 이루어진 하전부와 PET 필름 사이에 금속 박막이 삽입된 집진부로 이루어진 내부식 전기집진장치를 개발하여, 하전부 및 집진부 인가전압, 처리유량, 하전부 채널 수 등의 운전 조건에 따른 전기집진기 전/후단 입자 농도 변화를 측정하기 위하여 느???를 사용하였다. 본 연구에서 개발된 9채널 하전부와 65㎜ 집진부로 구성된 전기집진기의 성능평가 결과, 500㎥/hr 유량조건에서 하전부 및 집진부에 7 ㎸와 10㎸를 각각 인가하였을 때, 300 ㎚입자에 대한 포집효율이 90% 이상으로 높게 나타났다. Electrostatic precipitators (ESPs) used currently in industries for removing fine particles from semiconductors have to be made of expensive anticorrosive metallic materials in order to maintain their particle-removal performance. To satisfy the economical demands of industries, a novel ESP was developed; in this ESP, the charger is made of carbon fibers and collection plates consist of PET films among which an aluminum sheet is inserted. The ESP was evaluated by changing the voltages applied to the chargers and collection plates, flow rates, and number of charging channels. KCl particles with mean diameters of 100 ㎚ were used, and a scanning mobility particle sizer was used to measure the changes in particle number concentrations upstream and downstream of the ESP. The experimental results showed that more than 90% of the particles were removed by using the ESP containing ionizers with nine channels and 65-㎜ collection plates at 500 ㎥/hr when voltages of 7 ㎸ and 10 ㎸ were applied to the ionizers and collection plates, respectively.
김학준(Hak-Joon Kim),한방우(Bangwoo Han),정상현(Sang-Hyun Jeong),홍원석(Won-Suk Hong),신완호(Wan-Ho Shin),송동근(Dong-Keun Song),길상인(Sang-In Keel),김용진(Yong-Jin Kim),홍정희(Jeong-Hee Hong) 대한기계학회 2009 대한기계학회 춘추학술대회 Vol.2009 No.5
In a test duct with closed configuration, particle removal performance of an edge-plate type electrostatic precipitator (ESP) was evaluated at a high flow rate in CO₂ rich environments by changing gap distances between collection plates, concentrations of CO₂, particle sizes, types of electrodes, and types of power supplies. At the same experimental conditions, collection efficiency of particles with the mean particle size, 300 ㎚, decreased as the gap distance and CO₂ concentration increased because of low electrostatic force and low discharged current. In addition, as the particle size increased, the efficiency increased because of high charging rate of the large particles. With the electrode type which has higher surface area of a discharging plate and with the power supply which applied 25 ㎑-pulsed DC voltages, the removal efficiency was high even in rich CO₂ condition due to high electrostatic force at the same power consumption.