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R.F. Magnetron Sputtering법으로 제조한 LaCoO₃박막의 가스감지 특성
신정호,김정규,박기철,전춘배,장재영 慶尙大學校 工科大學 自動化및컴퓨터應用技術硏究所 1998 自動化 및 컴퓨터應用技術 Vol.5 No.1
LaCoO₃(LCO) thin film sensors were fabricated on an alumina substrate by r.f. magnetron sputtering. By varying the annealing temperature of the LCO film from 600℃ to 1000℃, we investigated X-ray diffraction pattern, electrical properties, and gas sensing properties of the films. The crystallinity was improved and the activation energy was increased with increasing the annealing temperature. The sensitivities of the LCO films for NH₃ and CO gases were also increased with the annealing temperature. Sensing properties of LCO thin films were improved when the measuring temperature was 350℃ or more
R.F. magnetron sputtering법으로 제조한 LaCoO₃박막의 가스감지 특성
장재영,신정호,김정규,박기철,전춘배 경북대학교 센서기술연구소 1998 센서技術學術大會論文集 Vol.9 No.1
LaCoO_(3)(LCO) thin film sensors were fabricated on an alumina substrate by the r.f. magnetron sputtering. By varying the annealing temperature of the LCO films from 600℃ to 1000℃, we investigated X-ray diffraction pattern, electrical properties, and gas sensing properties of the films. The crystallinity was improved and the activation energy was increased with increasing the annealing temperature. The sensitivity of the LCO films for NH_(3) and CO gases was also increased with the annealing temperature. Sensing properties of LCO thin films were improved when the measuring temperature was 350℃ or more.