http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
Membrane Pumping을 이용한 Nano Fountain-Pen의 수치적 연구
이진형(Jin-Hyoung Lee),이명관(Young-Kwan Lee),이석한(Suk-Han Lee),김훈모(Hun-Mo Kim),김윤제(Youn J. Kim) 대한기계학회 2005 대한기계학회 춘추학술대회 Vol.2005 No.11
Nano fountain-pen is a novel device to make the constant patterning in micro process using new designed probe. Fountain-pen nanolithography (FPN) is applied for constant supply of liquid in conjunction with local correction of patterns and surface variation in the micro process. Many studies for FPN are going on. Type of traditional probes is the multi-tip which can pattern by sub-micro unit. In this study, nano fountain-pen is made up reservoir, micro channels, tip and secondary chamber. Instead of traditional method only using capillary force, liquid can definitely and exactly inject with membrane pumping by repulsive force of tip. It is difficult to perform experiments in the micro range so that we carried out a new analysis for internal flow of nano fountain-pen with the membrane pumping, Using a commercial code, FLUENT, velocity, pressure and flow rate are obtained under laminar, unsteady and no-slip condition.