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최광열(G. Y. Choi),윤진욱(J. U. Yoon),안강호(K. H. Ahn) 대한기계학회 2002 대한기계학회 춘추학술대회 Vol.2002 No.5
Agglomerated and nonagglomerated SiO₂ particles are synthesized in furnace by the vapor feeding method<br/> for the test particle generator this study. These polydispersed particles are classified with DMA to extract<br/> equal mobility particles. Then these particles are introduced into Thermal Precipitator through the<br/> ESP(Electrostatic Precipitator) to see the thermophoretic particle deposition using CNCs(Condensation Nuclei<br/> Counter). The efficiency of thermophoretic particle deposition according to agglomerated and nonagglomerated<br/> particles in Thermal precipitator has been studied as a function of particle size and TEOS mole<br/> concentration using monodisperse particles classified by DMA. The results show that the particle deposition<br/> efficiency decreases as TEOS mole concentration increases and particle size increases. Therefore, it is<br/> concluded that the thermophoretic deposition efficiency is dependent of the particle morphology.