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공업용 클린룸을 위한 듀얼 프리쿨링 냉각탑의 냉각성능 실험
박수빈(Su-Bin Park),유경훈(Kyung-Hoon Yoo),양지석(Ji-Suk Yang),송덕용(Duk-Yong Song),황정호(Jung-Ho Hwang) 대한설비공학회 2018 대한설비공학회 학술발표대회논문집 Vol.2018 No.6
So far, energy conservation issue has been important in electronics industry due to the regulation of global warming gas emission prevention. Besides, in a cleanroom for semiconductor manufacturing, energy saving demand for cleanroom facility is getting stronger because of worldwide price competition of a semiconductor. In such an electronics industry cleanroom with huge internal heat generation, annual continuous cooling is necessary and subsequent energy consumption becomes enormous. Free cooling is very effective for the reduction of the energy consumption in the cleanroom facility in the winter and intermediate seasons. Therefore, in the present article, we describe the present cleanroom facility with respect to the system configuration and operation method of cooling heat source. Finally, experimental energy consumption results with and without free cooling are compared in a way to find out maximizing the energy saving effect of cooling heat source system with dual free cooling operation.
반도체 클린룸용 듀얼 프리쿨링 냉각탑의 중간기 운전에 관한 기초연구
박수빈(Su-Bin Park),유경훈(Kyung-Hoon Yoo),양지석(Ji-Suk Yang),송덕용(Duk-Yong Song),황정호(Jung-Ho Hwang) 대한설비공학회 2018 대한설비공학회 학술발표대회논문집 Vol.2018 No.11
In recent years, energy conservation issue has been important in electronics industry due to the regulation of global warming gas emission prevention. However, a large-scale clean room for manufacturing advanced electronic devices such as semiconductors and displays requires precise temperature and humidity control and consumes a lot of energy because it operates continuously throughout the year. In such a clean room facility, free cooling, which directly produces cold water from the cooling tower by using the cold energy of the low temperature outside air, which is natural energy, is very useful without operating the refrigerator for energy conservation in winter and mid-term. However, since free cooling is affected not only by the load but also by the wet bulb temperature of the outside air, it is necessary to control both of them. In addition, since the environment in the clean room needs to satisfy strict conditions such as temperature, humidity, and cleanliness, the ratio of the heat source equipment for maintaining the temperature and humidity is large.