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원자현미경을 이용한 나노구조체의 각도측정 방법 및 조건
조상준(Cho Sang-Joon),안병운(Ahn Byung-Woon),김준휘(Kim Joonhui),정상한(Chung Sang Han) 표준인증안전학회 2012 표준인증안전학회지 Vol.2 No.1
Invention of the atomic force microscopy (AFM) has provided a powerful measurement capability for sub-nano scale science and technology. Since invention, AFM has been significantly improved, and numerous innovative mechanisms and measuring modes have been developed. As the progress of miniaturization in patterns and photoresist structures in semiconductor, microelectronics, and glass industry, along with the fast advance of the extremely versatile nanotechnology applications, in a great number of industrial processes calls for reliable and comparable quantitative dimensional measurements in the micro- and submicrometer range. To make matters worse, there has been an increasing demand for measuring characteristics of sidewalls like line edge and line width roughness, wave pattern of sidewalls and angles of overhang features. Realizing that currently available CD-AFM or CD-SEM techniques do not satisfy this demand, new measurement standards are required for angles of micro- and nano-structures. In spite of the many capabilities of AFM, quite a few conditions have to be considered to measure critical dimensions (CD) quantitatively with repeatability and reproducibility. Piezo hysteresis, drift, tip shape and consistency, scanner orthogonality and other things are included in the conditions. The requirements and process to measure critical angle of nano- and micro-structure using AFM will be described in this paper.
안병운,최용수,박성준,윤종학 한국공작기계학회 2003 한국공작기계학회 추계학술대회논문집 Vol.2003 No.-
In micro hole punching process the burr occurs inevitably, but the burr must be minimized in order to improve the quality and accuracy of the product. In this study, magnetic field assisted polishing technique is applied to remove the burr which exists in nozzles for ink jet printer head and proved to be a feasible for deburring by experiment. The deburring characteristics of sheet metals was investigated changing with polishing time. After the deburring, the burr size has remarkably reduced and roundness of the hole also has improved.
박성준,안병운,윤종학 한국공작기계학회 2003 한국생산제조학회지 Vol.12 No.5
This study suggests the new ultraprecision finishing techniques for micro die and mold parts using magnetic field-assisted polishing. Conventional magnetic abrasives have several disadvantages, which are missing of abrasive particle and inequal mixture between magnetic particle and abrasive particle. Therefore, bonded magnetic abrasive particles are fabricated by several method. For example, plasma melting and direct bonding. Carbonyl iron powder is used as magnetic particle where silicon carbide and alumina are abrasive particles. Developed magnetic abrasives are analyzed using SEM. Feasibility of magnetic abrasive and polishing performance of this magnetic abrasive particles also have been investigated. After polishing surface roughness of workpiece is reduced from 85.4 nm Ra to 9 nm Ra.
윤종학,안병운,박성준 한국공작기계학회 2004 한국생산제조학회지 Vol.13 No.3
In micro hole punching process the burr occurs inevitably, but the burr must be minimized in order to improve the quality 1 and accuracy of the product. In this study, magnetic field-assisted polishing technique is applied to remove the burr which exists in nozzles for ink-jet printer head and proved to be a feasible for deburring by experiment. The deburring characterisics of sheet metals was investigated changing with polishing time and magnetic abrasive size. After the deburring, the burr size has remarkably reduced and roundness of the hole also has improved.
강정일,이윤호,안병운,윤종학 한국공작기계학회 2003 한국공작기계학회 추계학술대회논문집 Vol.2003 No.-
Micro-Channel ultra-precision polishing is a new technology used in magnetic field-assisted polishing. In this paper, an electromagnet or the jig of test system was designed and manufactured. A size of magnetic abrasive is used on 25~75μm and for the polish a micro-channel upper part. A surface of channel which is not even is manufactured using magnetic abrasive finishing at upper surface of micro-channel. As a result, the surface roughness rose by 80% after upper surface of micro- channel was polished up 8 minutes by polishing.
SS400강의 엔드밀 가공시 절삭력과 공구 파손에 관한 연구
윤종학,김윤겸,안병운 서울産業大學校 2002 논문집 Vol.53 No.1
Operators, work pieces, and machines can be damaged by unexpected tool fracture during cutting a work piece by using end mill. The purpose of this study is to investigate the variation of the cutting force generated during cutting the steel(SS400) by using end mill in the machining center and to check the tool fracture time generated during cutting a work piece and analyze the relationship between cutting force and fracture time, and to find the most proper cutting condition. The experiment was carried out to measure the cutting force generated during upper-milling of straight, convex and concave shaped of work pieces by using a two?blade end mill of 10mm in the machining center. Spindle speed, table speed and the cutting depth were 1060 rpm, 160 mm/min, and 1.5mm respectively. Various spindle speed(850, 950, 1060, 1180, 1320 rpm), table speed(120, 140, 160, 180, 200, mm/min), and the cutting depths(1.1, 1.3, 1.5, 1.7, 1.9 mm) were tired to obtain more proper cutting conditions. The cutting force of concave shaped work piece is largest while that of convex shaped work piece is smallest. The cutting force decreased when the spindle speed increased. And the cutting force increased when the table speed and the cutting depth increased. It was also identified that the tool fracture time increased as the cutting force decreased. In consideration of' the cutting efficiency and tool life time, the most proper cutting condition was achieved when the spindle speed, table speed and the cutting depth were 1010rpm, 163mm/min and 1.55mm respectively.