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나노 임프린트 장비 환경제어를 위한 초정밀 온도 제어에 관한 연구
박경서(Kyungseo Park),송영중(Youngjoog Song),임홍재(Hongjae Im),장시열(Siyeol Jang),이기성(Keesung Lee),정재일(Jay Il Jeong),신동훈(Donghoon Shin) 대한기계학회 2007 대한기계학회 춘추학술대회 Vol.2007 No.10
During a process of a nanoimprint for manufacturing LCD, a small temperature variation on the LCD glass can cause thermal stress and generate unexpected displacement. To avoid this trouble, a precision temperature control unit using thermoelectric modules is appropriate for nanoimprint processes. also an air cooling process using unit take account of air current analysis in chamber is important. The unit consists of an air control system, a cooling water control system, and a power control system. The air control system includes a thermoelectric module, thermocouples measuring temperatures of air and a duct-stale fin, and one air fans. The heat generated by the thermoelectric module is absorbed by the cooling water control system. The power control system catches the temperature of the thermoelectric module, and a PID controller with SCR(Silicon Control Rectifier) control the input power of the thermoelectric module. Temperature control performance is evaluated by experiment and simulation. The control is heating and cooling at the same time by PID controller. So reducing temperature control error. The unit is consists of an air cycle method, so reduce the time and easy to contl. also Optimizing an air current contributive improves performance of nanoimprint
열전소자를 이용한 정밀 항온 유지 장치에 관한 실험 및 시뮬레이션 연구
박경서(Kyungseo Park),송영중(Youngjoog Song),임홍재(Hongjae Im),장시열(Siyeol Jang),이기성(Keesung Lee),정재일(Jay Jeong),신동훈(Donghoon Shin) 대한기계학회 2007 대한기계학회 춘추학술대회 Vol.2007 No.5
During a process of a nanoimprint for manufacturing LCD, a small temperature variation on the LCD glass can cause thermal stress and generate unexpected displacement. To avoid this trouble, a precision temperature control unit using thermoelectric modules is appropriate for nanoimprint processes. The unit consists of an air control system, a cooling water control system, and a power control system. The air control system includes a thermoelectric module, thermocouples measuring temperatures of air and a duct-stale fin, and two air fans. The heat generated by the thermoelectric module is absorbed by the cooling water control system. The power control system catches the temperature of the thermoelectric module, and a PID controller with SCR controls the input power of the thermoelectric module. Temperature control performance is evaluated by experiment and simulation. The temperature control unit is able to control the exit temperature about ±2℃ from the incoming fluid temperature, and the error range is ±0.1℃. However, the control time is approximately 30minute, which needs further study of active control