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박우성 ( U Sung Park ),부상필 ( Sang Pil Boo ),박수영 ( Soo Young Park ),김도형 ( Do Hyung Kim ),송진우 ( Jin Woo Song ),전종업 ( Jong Up Jeon ),김준원 ( Joon Won Kim ) 한국센서학회 2012 센서학회지 Vol.21 No.2
This paper describes the design, fabrication and testing of a micromachined resonant accelerometer consisting of a symmetrical pair of proof masses and double-ended tuning fork(DETF) oscillators. Under the external acceleration along the input axis, the proof mass applies forces to the oscillators, which causes a change in their resonant frequency. This frequency change is measured to indicate the applied acceleration. Pivot anchor and leverage mechanisms are adopted in the accelerometer to generate larger force from a proof mass under certain acceleration, which enables increasing its scale factor. Finite element method analyses have been conducted to design the accelerometer and a silicon on insulator(SOI) wafer with a substrate glass wafer was used for fabricating it. The fabricated accelerometer has a scale factor of 188 Hz/g, which is shown to be in agreement with analysis results.