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        배기덕(Ki Deok Bae),백석순(Seog Soon Baek),신종우(Jong-Woo Shin),임형태(Hyung-Taek Lim),신수호(Su Ho Shin),오용수(Yongsoo Oh) 대한기계학회 2003 대한기계학회 춘추학술대회 Vol.2003 No.11

        A new thermal inkjet printer head on SOI wafer with virtual valve was proposed. It was composed of two<br/> rectangular heaters with same size. So we could call it T-jet(Twin jet). T-jet has a lot of merits. It has the<br/> advantage of being fabricated with one wafer and is easy to change the size of chamber, nozzle, restrictor and<br/> so on. However, above all, It is the best point that T-jet has a virtual valve. And it was manufactured on SOI<br/> wafer. The chamber was formed in its upper silicon whose thickness was 40um. The chamber’s bottom layer<br/> was silicon dioxide of SOI wafer and two heaters were located underneath the chamber’s ceiling. And the<br/> restirctor was made beside the chamber. Nozzle was molded by process of Ni plating. Ni was 30um thick.<br/> Nozzle ejection test was performed by printer head having 56 nozzles in 2 columns with 600NPI(nozzle per<br/> inch) and black ink. It measured a drop velocity of 12m/s, a drop volume of 30pl, and a maximum firing<br/> frequency of 12KHz for single nozzle ejection. Throwing out the ink drop in whole nozzles at the same time,<br/> it was observed that the uniformity of the drop velocity and volume was less than 4%.

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